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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 10, Iss. 23 — Nov. 18, 2002
  • pp: 1361–1367

Focus errors and their correction in microscopic deformation analysis using correlation

Mark C. Pitter, Chung W. See, Jason Y. L. Goh, and Michael G. Somekh  »View Author Affiliations


Optics Express, Vol. 10, Issue 23, pp. 1361-1367 (2002)
http://dx.doi.org/10.1364/OE.10.001361


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Abstract

Subpixel digital image correlation has been applied to microscope images to analyze surface deformation. Nonintegral pixel shifting and successive approximation are used to calculate the subpixel element of the sample displacement without introducing systematic interpolation errors. Although in-plane displacement precision of better than 2% of a pixel, or < 15 nm at x10 magnification, is shown to be achievable, the use of even moderate numerical aperture microscope objectives render the technique sensitive to errors or variations in sample focusing. The magnitude of this effect is determined experimentally and a focus compensation method is described and demonstrated.

© 2002 Optical Society of America

OCIS Codes
(100.2000) Image processing : Digital image processing
(180.0180) Microscopy : Microscopy

ToC Category:
Research Papers

History
Original Manuscript: August 16, 2002
Revised Manuscript: November 12, 2002
Published: November 18, 2002

Citation
Mark Pitter, Chung See, Jason Goh, and Michael Somekh, "Focus errors and their correction in microscopic deformation analysis using correlation," Opt. Express 10, 1361-1367 (2002)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-10-23-1361


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References

  1. H. A. Bruck, S. R. McNeill, M. A. Sutton andW. H. Peters III, �??Digital image correlation using Newton-Raphson method of partial differential correction,�?? Exp. Mech. 29, 261-267 (1989). [CrossRef]
  2. M. Sjödahl, �??Accuracy in electronic speckle photography,�?? Appl. Opt. 36, 2875-2885 (1997). [CrossRef] [PubMed]
  3. M. Sjödahl, �??Electronic speckle photography: increased accuracy by nonintegral pixel shifting,�?? Appl. Opt. 33, 6667-6673 (1994). [CrossRef] [PubMed]
  4. Z. Sun, J. S. Lyons and S. R. McNeill, �??Measuring microscopic deformations with digital image correlation,�?? Opt. Laser Eng. 27, 409-428 (1997). [CrossRef]
  5. P. Zhou and K. E. Goodson, �??Subpixel displacement and deformation gradient measurement using digital image/speckle correlation (DISC),�?? Opt. Eng. 40, 1613-1620 (2001). [CrossRef]
  6. D. Vogel, V. Grosser, A. Schubert and B. Michel, �??MicroDAC strain measurements for electronics packaging structure,�?? Opt. Laser Eng. 36, 195-211 (2001). [CrossRef]
  7. M. C. Pitter, C. W. See and M. G. Somekh, �??Subpixel microscopic deformation analysis using correlation and artificial neural networks,�?? Opt. Express 8, 322-327 (2001), http://www.opticsexpress.org/abstract.cfm?URI=OPEX-8-6-322. [CrossRef] [PubMed]
  8. B. Han, �??Recent advances of moiré and microscopic moiré interferometry for thermal deformation analyses of microelectronic devices,�?? Exp. Mech. 38, 278-288 (1998).
  9. R. N. Bracewell, The Fourier Transform and its Applications (McGraw-Hill, Singapore, 1986), Chap. 6.
  10. M. Frigo and S. G. Johnson, �??FFTW: an adaptive software architecture for the FFT,�?? in Proc. ICASSP 3 (1998), pp. 1381-1384, <a href="http://www.fftw.org/fftw-paper-icassp.pdf">http://www.fftw.org/fftw-paper-icassp.pdf</a>.
  11. M. J. Kidger, �??Use of the Levenberg-Marquardt (damped least-squares) optimization method in lens design,�?? Opt. Eng. 32, 1731-1739 (1993). [CrossRef]

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