Focus errors and their correction in microscopic deformation analysis using correlation
Optics Express, Vol. 10, Issue 23, pp. 1361-1367 (2002)
http://dx.doi.org/10.1364/OE.10.001361
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Abstract
Subpixel digital image correlation has been applied to microscope images to analyze surface deformation. Nonintegral pixel shifting and successive approximation are used to calculate the subpixel element of the sample displacement without introducing systematic interpolation errors. Although in-plane displacement precision of better than 2% of a pixel, or < 15 nm at x10 magnification, is shown to be achievable, the use of even moderate numerical aperture microscope objectives render the technique sensitive to errors or variations in sample focusing. The magnitude of this effect is determined experimentally and a focus compensation method is described and demonstrated.
© 2002 Optical Society of America
[Optical Society of America ]
OCIS Codes
(100.2000) Image processing : Digital image processing
(180.0180) Microscopy : Microscopy
ToC Category:
Research Papers
History
Original Manuscript: August 16, 2002
Revised Manuscript: November 12, 2002
Published: November 18, 2002
Citation
Mark Pitter, Chung See, Jason Goh, and Michael Somekh, "Focus errors and their correction in microscopic deformation analysis using correlation," Opt. Express 10, 1361-1367 (2002)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-10-23-1361
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