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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 10, Iss. 23 — Nov. 18, 2002
  • pp: 1361–1367

Focus errors and their correction in microscopic deformation analysis using correlation

Mark C. Pitter, Chung W. See, Jason Y. L. Goh, and Michael G. Somekh  »View Author Affiliations

Optics Express, Vol. 10, Issue 23, pp. 1361-1367 (2002)

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Subpixel digital image correlation has been applied to microscope images to analyze surface deformation. Nonintegral pixel shifting and successive approximation are used to calculate the subpixel element of the sample displacement without introducing systematic interpolation errors. Although in-plane displacement precision of better than 2% of a pixel, or < 15 nm at x10 magnification, is shown to be achievable, the use of even moderate numerical aperture microscope objectives render the technique sensitive to errors or variations in sample focusing. The magnitude of this effect is determined experimentally and a focus compensation method is described and demonstrated.

© 2002 Optical Society of America

OCIS Codes
(100.2000) Image processing : Digital image processing
(180.0180) Microscopy : Microscopy

ToC Category:
Research Papers

Original Manuscript: August 16, 2002
Revised Manuscript: November 12, 2002
Published: November 18, 2002

Mark Pitter, Chung See, Jason Goh, and Michael Somekh, "Focus errors and their correction in microscopic deformation analysis using correlation," Opt. Express 10, 1361-1367 (2002)

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