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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 1 — Jan. 13, 2003
  • pp: 54–60

Non-mechanically-axial-scanning confocal microscope using adaptive mirror switching

Yoshiaki Yasuno, Shuichi Makita, Toyohiko Yatagai, Tobias F. Wiesendanger, Aiko K. Ruprecht, and Hans J. Tiziani  »View Author Affiliations

Optics Express, Vol. 11, Issue 1, pp. 54-60 (2003)

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A non-axial-scanning confocal microscope employing a monochromatic light source has been developed. The system controls the defocus of an objective into three to five optimized states by using a membrane-adaptive mirror, and determines the axial height of an object according to the confocal output value with each defocus. A genetic algorithm is employed to optimize the adaptive mirror shape, with the information entropy of the spectrum of the lateral confocal spot profile used as a cost function in the genetic algorithm. Our experimental system successfully determined axial object height within 50 µm range with 0.64 % of error.

© 2002 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(180.1790) Microscopy : Confocal microscopy

ToC Category:
Research Papers

Original Manuscript: December 12, 2002
Revised Manuscript: January 6, 2003
Published: January 13, 2003

Yoshiaki Yasuno, Shuichi Makita, Toyohiko Yatagai, Tobias Wiesendanger, Aiko Ruprecht, and Hans Tiziani, "Non-mechanically-axial-scanning confocal microscope using adaptive mirror switching," Opt. Express 11, 54-60 (2003)

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