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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 12 — Jun. 16, 2003
  • pp: 1406–1410

Optical properties of spin-on deposited low temperature titanium oxide thin films

J. T. Rantala and A. H. O. Kärkkäinen  »View Author Affiliations

Optics Express, Vol. 11, Issue 12, pp. 1406-1410 (2003)

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This letter presents a method to fabricate high quality, high refractive index titanium oxide thin films by applying liquid phase spin-on deposition combined with low temperature annealing. The synthesis of the liquid form titanium oxide material is carried out using a sol-gel synthesis technique. The material can be annealed at low temperature (150 C°) to achieve relatively high refractive index of 1.94 at 632.8 nm wavelength, whereas annealing at 350 C° results in index of 2.03 at 632.8 nm. Film depositions are demonstrated on silicon substrates with 0.5% uniformity in thickness. Refractive indices and extinction coefficients are characterized over a broad wavelength range to demonstrate the optical performance of this novel aqueous phase spin-on deposited hybrid titanium oxide material.

© 2003 Optical Society of America

OCIS Codes
(160.4670) Materials : Optical materials
(160.6060) Materials : Solgel

ToC Category:
Research Papers

Original Manuscript: April 21, 2003
Revised Manuscript: May 29, 2003
Published: June 16, 2003

J. Rantala and A. H. O. Kärkkäinen, "Optical properties of spin-on deposited low temperature titanium oxide thin films," Opt. Express 11, 1406-1410 (2003)

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