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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 18 — Sep. 8, 2003
  • pp: 2177–2182

Flatness measurement by a grazing Ronchi test

Noé Alcalá Ochoa, Miguel Mora-González, and Fernando Mendoza Santoyo  »View Author Affiliations


Optics Express, Vol. 11, Issue 18, pp. 2177-2182 (2003)
http://dx.doi.org/10.1364/OE.11.002177


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Abstract

The Ronchi test with a LCD amplitude sinusoidal grating is used for testing nominally flat surfaces. We prove that it is possible to measure flat surfaces without using a reference element by modifying the common optical Ronchi set up. The Ronchi rulings are computer generated and displayed on the LCD. By displaying various phase-shifted rulings and capturing the corresponding images, the phase is obtained with the conventional phase-shifting algorithms. Theoretical and experimental results are shown.

© 2003 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.5080) Diffraction and gratings : Phase shift
(100.2650) Image processing : Fringe analysis
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(160.3710) Materials : Liquid crystals

ToC Category:
Research Papers

History
Original Manuscript: August 12, 2003
Revised Manuscript: August 23, 2003
Published: September 8, 2003

Citation
Noé Ochoa, Miguel Mora-González, and Fernando Santoyo, "Flatness measurement by a grazing Ronchi test," Opt. Express 11, 2177-2182 (2003)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-11-18-2177


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