Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

doi:10.1364/OE.11.002244

Optics Express

Editor: Michael Duncan
Vol. 11, Iss. 18 — Sep. 8, 2003
pp: 2244–2252

Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

D. W. de Lima Monteiro, O. Akhzar-Mehr, P. M. Sarro, and G. Vdovin »View Author Affiliations

Optics Express, Vol. 11, Issue 18, pp. 2244-2252 (2003)
http://dx.doi.org/10.1364/OE.11.002244

View Full Text Article

Enhanced HTML Acrobat PDF (2073 KB)

Journal Search
Article Lookup

Article Tools

Share

Citations

Alert me when this article is cited
Export Citation/Save

Abstract
Article Info
References (7)
Cited By
Figures (8)
Multimedia (1)
Metrics
Related Content

Abstract

We report on the microfabrication of continuous aspherical optical surfaces with a single-mask process, using anisotropic etching of silicon in a KOH water solution. Precise arbitrary aspherical surfaces with lateral scales on the order of several millimeters and a profile depth on the order of several micrometers were fabricated using this process. We discuss the factors defining the precision of the formed component and the resulting surface quality. We demonstrate 1 mm and 5 mm replicated aspherical phase plates, reproducing defocus, tilt, astigmatism and high-order aberrations. The technology has a potential for serial production of reflective and refractive arbitrary aspherical micro-optical components.

OCIS Codes
(220.1000) Optical design and fabrication : Aberration compensation
(220.1250) Optical design and fabrication : Aspherics
(220.3620) Optical design and fabrication : Lens system design
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(350.3850) Other areas of optics : Materials processing

ToC Category:
Research Papers

History
Original Manuscript: June 26, 2003
Revised Manuscript: September 1, 2003
Published: September 8, 2003

Citation
D. W. de Lima Monteiro, O. Akhzar-Mehr, P. M. Sarro, and G. Vdovin, "Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si," Opt. Express 11, 2244-2252 (2003)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-11-18-2244

Sort: Journal | Reset

References

I. D. Nikolov, K. Goto, S. Mitsugi, Y. J. Kim, V. I. Kavardjikov, �??Nanofocusing recording probe for an optical disk memory,�?? Nanotechnology 13, 471477 (2000).
C. Paterson and J. C. Dainty, �??A hybrid curvature and gradient wavefront sensor,�?? Opt. Lett. 25 (23), 1687-1689 (2000). [CrossRef]
H.P. Herzig (ed), Micro-Optics: elements, systems and applications, (London, Taylor & Francis, 1998).
D. L. Kendall, W. P. Eaton, R. Manginell and T. G. Digges Jr., �??Micromirror arrays using KOH:H2O micromachining of silicon for lens templates, geodesic lenses, and other applications,�?? Opt. Eng. 33 (11), 3578-3588 (1994). [CrossRef]
G. Vdovin, O. Akhzar-Mehr, P. M. Sarro, D. W. de Lima Monteiro and M. Y. Loktev, �??Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining,�?? in MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, U. Behringer, B. Courtois, A. M. Khounsary and D. G. Uttamchandani, Proc. SPIE 4945, 107-111 (2003). [CrossRef]
D. Malacara and S. L. DeVore, �??Optical interferogram evaluation and wavefront fitting,�?? in Optical Shop Testing, D. Malacara, 2nd ed. (Wiley Interscience, New York, 1992).
G. Findler, J. Muchow, M. Koch and H. Munzel, �??Temporal evolution of silicon surface roughness during anisotropic etching processes,�?? in Micro Electro Mechanical Systems, pp.62-66 (New York, Institute of Electrical and Electronics Engineers, 1992).

Micro Electro Mechanical Systems

G. Findler, J. Muchow, M. Koch and H. Munzel, �??Temporal evolution of silicon surface roughness during anisotropic etching processes,�?? in Micro Electro Mechanical Systems, pp.62-66 (New York, Institute of Electrical and Electronics Engineers, 1992).

Nanotechnology

I. D. Nikolov, K. Goto, S. Mitsugi, Y. J. Kim, V. I. Kavardjikov, �??Nanofocusing recording probe for an optical disk memory,�?? Nanotechnology 13, 471477 (2000).

Opt. Eng.

D. L. Kendall, W. P. Eaton, R. Manginell and T. G. Digges Jr., �??Micromirror arrays using KOH:H2O micromachining of silicon for lens templates, geodesic lenses, and other applications,�?? Opt. Eng. 33 (11), 3578-3588 (1994). [CrossRef]

Opt. Lett.

C. Paterson and J. C. Dainty, �??A hybrid curvature and gradient wavefront sensor,�?? Opt. Lett. 25 (23), 1687-1689 (2000). [CrossRef]

Optical Shop Testing

D. Malacara and S. L. DeVore, �??Optical interferogram evaluation and wavefront fitting,�?? in Optical Shop Testing, D. Malacara, 2nd ed. (Wiley Interscience, New York, 1992).

Proc. SPIE

G. Vdovin, O. Akhzar-Mehr, P. M. Sarro, D. W. de Lima Monteiro and M. Y. Loktev, �??Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining,�?? in MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, U. Behringer, B. Courtois, A. M. Khounsary and D. G. Uttamchandani, Proc. SPIE 4945, 107-111 (2003). [CrossRef]

Other

H.P. Herzig (ed), Micro-Optics: elements, systems and applications, (London, Taylor & Francis, 1998).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Click here to see a list of articles that cite this paper