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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 18 — Sep. 8, 2003
  • pp: 2253–2258

UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask

Weixing Yu and X.-C. Yuan  »View Author Affiliations

Optics Express, Vol. 11, Issue 18, pp. 2253-2258 (2003)

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We report a simple method for forming surface corrugation of microlenses based on a volume growth effect of sol-gel glass. The volume growth effect was fully calibrated with a high-energy beam-sensitive grayscale mask, where the amount of growth was determined as a function of electron-beam-induced optical densities in the mask. This technique provides an excellent surface smoothness compared with other development based fabrication techniques. For example, a refractive microlens with a diameter of 140 µm and a sag height of 2.13 µm was demonstrated.

© 2003 Optical Society of America

OCIS Codes
(160.4670) Materials : Optical materials
(160.6060) Materials : Solgel
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Research Papers

Original Manuscript: August 27, 2003
Revised Manuscript: September 4, 2003
Published: September 8, 2003

Weixing Yu and X. Yuan, "UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask," Opt. Express 11, 2253-2258 (2003)

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