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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 24 — Dec. 1, 2003
  • pp: 3202–3209

Volume holographic imaging for surface metrology at long working distances

Arnab Sinha and George Barbastathis  »View Author Affiliations


Optics Express, Vol. 11, Issue 24, pp. 3202-3209 (2003)
http://dx.doi.org/10.1364/OE.11.003202


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Abstract

We present an imaging scheme that takes advantage of the superior lateral resolution of volume holographic imaging (VHI)[1] and a-priori surface information about the object to build a profilometer that can resolve 50µm longitudinal features at a working distance of ≈ 50 cm with a single VHI camera. We discuss the scheme and present experimental results of surface profiles of MEMS devices.

© 2003 Optical Society of America

OCIS Codes
(090.7330) Holography : Volume gratings
(110.0110) Imaging systems : Imaging systems

ToC Category:
Research Papers

History
Original Manuscript: October 27, 2003
Revised Manuscript: November 10, 2003
Published: December 1, 2003

Citation
Arnab Sinha and George Barbastathis, "Volume holographic imaging for surface metrology at long working distances," Opt. Express 11, 3202-3209 (2003)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-11-24-3202


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References

  1. G. Barbastathis and D.J. Brady, �??Multidimensional tomographic imaging using volume holography,�?? Proceedings of the IEEE 87, 2098-2120, (1999). [CrossRef]
  2. G. Barbastathis, M. Balberg and D. J. Brady, �??Confocal microscopy with a volume holographic filter,�?? Opt. Lett. 24, 811-813 (1999). [CrossRef]
  3. A. Sinha and G. Barbastathis, �??Volume holographic telescope,�?? Opt. Lett. 27, 1690-1692 (2002). [CrossRef]
  4. W. Liu, D. Psaltis and G. Barbastathis, �??Real-time spectral imaging in three spatial dimensions,�?? Opt. Lett. 27, 854-856 (2002). [CrossRef]
  5. A. Sinha, W. Sun, T. Shih and G. Barbastathis, �??Volume holographic imaging in the transmission geometry,�?? to appear in Appl. Opt.
  6. D. Marr, Vision, (W. H. Freeman & Co, 1982).
  7. G. Binnig, C. F. Quate and C. Gerber, �??Atomic Force Microscope,�?? Phys. Rev. Lett., 56, 930-933 (1986). [CrossRef] [PubMed]
  8. M. Born and E. Wolf, Principles of optics, (Pergamon Press, Cambridge, UK, 1998).
  9. J. White, H. Ma, J. Lang and A. Slocum, �??An instrument to control parallel plate separation for nanoscale flow control,�?? Rev. Sc. Instruments 74, 4869-4875 (2003). [CrossRef]

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