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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 25 — Dec. 15, 2003
  • pp: 3393–3403

Asymmetrical dual-cavity filters and their application to thickness uniformity monitoring

Daniel Poitras  »View Author Affiliations


Optics Express, Vol. 11, Issue 25, pp. 3393-3403 (2003)
http://dx.doi.org/10.1364/OE.11.003393


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Abstract

The use of asymmetrical dual-cavity (ADC) filters with two transmittance peaks is proposed for a simultaneous monitoring of the thickness uniformities of high- and low-index materials. The method described works independently of the manufacturing technique used, and can detect non-uniformities of refractive indices. The properties of these ADC filters are studied using Smith’s concept of effective interfaces, and admittance diagrams. An experimental application of this method is demonstrated, which can be used for increasing the yield of manufactured optical filters.

© 2003 Optical Society of America

OCIS Codes
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Research Papers

History
Original Manuscript: November 12, 2003
Revised Manuscript: November 25, 2003
Published: December 15, 2003

Citation
Daniel Poitras, "Asymmetrical dual-cavity filters and their application to thickness uniformity monitoring," Opt. Express 11, 3393-3403 (2003)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-11-25-3393


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References

  1. J. A. Dobrowolski, S. Browning, M. Jacobson, and M. Nadal, �??2001 Optical Society of America Topical Meeting on Optical Coatings: Manufacturing Problem,�?? Appl. Opt. 41, 1�??14 (2002). [CrossRef]
  2. S. D. Smith, �??Design of Multilayer Filters by Considering Two Effective Interfaces,�?? J. Opt. Soc. Am. 48, 43�??50 (1958). [CrossRef]
  3. H. A. Macleod, Thin-film optical filters (Institute of Physics, Bristol, 2001). [CrossRef]
  4. D. Poitras, T. Cassidy, and S. Guétré, �??Asymmetrical Dual-Cavity Filters: Theory and Application,�?? in Optical Interference Coatings, OSA Technical Digest, pp. MD3�??1�??3 (Optical Society of America, Washington D.C., 2001).
  5. D. I. Pearson, P. Luff, M. Davis, and A. T. Howe, �??Use of asymmetric dual-cavity filters to track small H and L variations as a tool to increase yield of DWDM filters,�?? in Photonic Integrated Systems, L. A. Eldada, A. R. Pirich, P. L. Repak, R. T. Chen and J. C. Chon, eds., Proc. SPIE 4998, 178�??185 (2003). [CrossRef]

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