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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 26 — Dec. 29, 2003
  • pp: 3555–3561

Fabrication and characterization of three-dimensional silicon tapers

Anita Sure, Thomas Dillon, Janusz Murakowski, Chunchen Lin, David Pustai, and Dennis W. Prather  »View Author Affiliations

Optics Express, Vol. 11, Issue 26, pp. 3555-3561 (2003)

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We present the fabrication of 3D adiabatically tapered structures, for efficient coupling from an optical fiber, or free-space, to a chip. These structures are fabricated integrally with optical waveguides in a silicon-on-insulator wafer. Fabrication involves writing a single grayscale mask in HEBS glass with a high-energy electron beam, ultra-violet grayscale lithography, and inductively coupled plasma etching. We also present the experimentally determined coupling efficiencies of the fabricated tapers using end-fire coupling. The design parameters of the tapered structures are based on electromagnetic simulations and are discussed in this paper.

© 2003 Optical Society of America

OCIS Codes
(060.1810) Fiber optics and optical communications : Buffers, couplers, routers, switches, and multiplexers
(110.3960) Imaging systems : Microlithography
(220.0220) Optical design and fabrication : Optical design and fabrication

ToC Category:
Research Papers

Original Manuscript: November 18, 2003
Revised Manuscript: December 10, 2003
Published: December 29, 2003

Anita Sure, Thomas Dillon, Janusz Murakowski, Chunchen Lin, David Pustai, and Dennis Prather, "Fabrication and characterization of three-dimensional silicon tapers," Opt. Express 11, 3555-3561 (2003)

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  1. T. Tamir: Integrated Optics, 2nd Topics Appl. Phys. 7 (Springer, Berlin Heidelberg, New York, 1979) Chap. 1.
  2. <a href="http://www.corning.com">http://www.corning.com</a>
  3. Zhaolin Lu, Peng Yao, David Pustai, Janusz Murakowski, and Dennis W. Prather, �??Silicon-Prism Coupling into 260nm-SOI Slab Waveguides,�?? Opt. Lett. (Accepted).
  4. R. Hunsperger, Integrated Optics: Theory and Technology (Springer-Verlag, 1995).
  5. H. M. Presby and C. A. Edwards, �??Near 100% efficient fiber microlenses,�?? Electron. Lett. 28, 582-584 (1992). [CrossRef]
  6. T. Brenner, W. Hunziker, M. Smit, M. Bachmann, G. Guekos, and H. Melchior, �??Vertical InP/InGasAsP tapers for low-loss optical fiber-waveguide coupling,�?? Electron. Lett. 28, 2040-2041 (1992). [CrossRef]
  7. M. Chien, U. Koren, T. L. Koch, B. I. Miller, M. G. Young, M. Chien, and G. Raybon, "Short cavity distributed Bragg reflector laser with an integrated tapered output waveguide," IEEE Photon. Technol. Lett. 3, 418-420 (1991). [CrossRef]
  8. T. Brenner and H. Melchior, "Integrated Optical Modeshape Adapters in InGaAsP/InP for efficient Fiber-to-Waveguide Coupling," IEEE Photon. Technol. Lett. 5, 1053-1056 (1993). [CrossRef]
  9. G. Muller, G. Wender, L. Stoll, H. Westermeier, and D. Seeberger, "Fabrication techniques for vertically tapered InP/InGasAsP spot-size transformers with very low loss," presented at Proc. Eur. conf. Integrated Optics, Neuchatel, Switzerland, 1993.
  10. B. Jacobs, R. Zengerle, K. Faltin, and W. Weiershausen, "Vertically tapered spot size transformers by a simple masking technique," Electron. Lett. 31, 794-796, (1995). [CrossRef]
  11. Ingrid Moerman, Peter P. Van Daele, and P. M. Demeester, "A Review on Fabrication Technologies for the Monolithic Integration of Tapers with III-V Semiconductor Devices," IEEE J. Sel. Top. Quantum Electron. 3, 1308-1320 (1997). [CrossRef]
  12. R. S. Fan and B. Hooker, "Tapered Polymer Single-Mode Waveguides for Mode Transformation," IEEE J. Lightwave Technol. 17, 466-474 (1990). [CrossRef]
  13. <a href="http://www.confluentphotonics.com/technology/technical_papers.php#fabrication">http://www.confluentphotonics.com/technology/technical_papers.php#fabrication</a>
  14. J. J. Fijol, E. E. Fike, P. B. Keating, D. Gilbody, J. LeBlanc, S. A. Jacobson, W. J. Kessler, and M. B. Frish, "Fabrication of silicon-on-insulator adiabatic tapers for low loss optical interconnection of photonic devices," presented at the Photonics West, San Jose, California, USA, 25-31 Jan. 2003.
  15. D. W. Prather, J. Murakowski, S. Shi, S. Venkataraman, A. Sharkawy, CH. Chen, D. Pustai, "High efficiency coupling structure for a single-line defect photonic-crystal waveguide," Opt. Lett. 1601-1603 (2002). [CrossRef]
  16. G. R. Hadley, "Design of tapered waveguides for improved output coupling," IEEE Photon. Technol. Lett. 5, 892-894 (1993).
  17. Dominic F G Gallagher and T. P. Felici, "Eigen Mode Expansion_ A Powerful Computational Method for the Rigorous Solution of Optical Propagation Problems," in Business Briefing: Global Optical Communications, 1-6 (2002).
  18. C. Wu, �??High Energy Beam Sensitive Glasses,�?? February 1994. U.S. Patent 5,285,517.
  19. Thomas Dillon, Anita Sure, Janusz Murakowski and Dennis W. Prather, �??Continuous-tone grayscale mask fabrication using high-energy-beam-sensitive glass," (To be published).
  20. Thomas Dillon, Anita Sure, Janusz Murakowski and Dennis W. Prather, �??Process development and application of grayscale lithography for efficient three-dimensionally profiled fiber-to-waveguide couplers,�?? Proceedings of SPIE, 5183 (2003).
  21. Marion LeCompte, Xiang Gao, and Dennis W. Prather, �??Photoresist characterization and linearization procedure for the gray-scale fabrication of diffractive optical elements,�?? Appl. Opt. 40, 5291-5927 (2001). [CrossRef]
  22. C. Gimkiewicz, D. Hagedorn, J. Jahns, E. B. Kley, and F. Thoma, "Fabrication of micro prisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam-sensitive glass," Appl. Opt. 38, 2986-2990 (1999). [CrossRef]

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