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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 26 — Dec. 29, 2003
  • pp: 3555–3561

Fabrication and characterization of three-dimensional silicon tapers

Anita Sure, Thomas Dillon, Janusz Murakowski, Chunchen Lin, David Pustai, and Dennis W. Prather  »View Author Affiliations


Optics Express, Vol. 11, Issue 26, pp. 3555-3561 (2003)
http://dx.doi.org/10.1364/OE.11.003555


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Abstract

We present the fabrication of 3D adiabatically tapered structures, for efficient coupling from an optical fiber, or free-space, to a chip. These structures are fabricated integrally with optical waveguides in a silicon-on-insulator wafer. Fabrication involves writing a single grayscale mask in HEBS glass with a high-energy electron beam, ultra-violet grayscale lithography, and inductively coupled plasma etching. We also present the experimentally determined coupling efficiencies of the fabricated tapers using end-fire coupling. The design parameters of the tapered structures are based on electromagnetic simulations and are discussed in this paper.

© 2003 Optical Society of America

OCIS Codes
(060.1810) Fiber optics and optical communications : Buffers, couplers, routers, switches, and multiplexers
(110.3960) Imaging systems : Microlithography
(220.0220) Optical design and fabrication : Optical design and fabrication

ToC Category:
Research Papers

History
Original Manuscript: November 18, 2003
Revised Manuscript: December 10, 2003
Published: December 29, 2003

Citation
Anita Sure, Thomas Dillon, Janusz Murakowski, Chunchen Lin, David Pustai, and Dennis Prather, "Fabrication and characterization of three-dimensional silicon tapers," Opt. Express 11, 3555-3561 (2003)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-11-26-3555


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