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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 3 — Feb. 10, 2003
  • pp: 270–281

Blazed grating fabrication through gray-scale X-ray lithography

Pantazis Mouroulis, Frank T. Hartley, Daniel W. Wilson, Victor E. White, Aidan Shori, Steven Nguyen, Min Zhang, and Martin Feldman  »View Author Affiliations


Optics Express, Vol. 11, Issue 3, pp. 270-281 (2003)
http://dx.doi.org/10.1364/OE.11.000270


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Abstract

Blazed gratings have been fabricated using gray-scale X-ray lithography. The gratings have high efficiency, low parasitic light, and high groove quality. The fabrication technique and resist characterization are described. The gratings can be generated over a considerable range of distances from the X-ray mask, thus demonstrating the ability to write gratings on a substrate of effectively arbitrary shape.

© 2002 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(220.3740) Optical design and fabrication : Lithography

ToC Category:
Research Papers

History
Original Manuscript: January 6, 2003
Revised Manuscript: February 5, 2003
Published: February 10, 2003

Citation
Pantazis Mouroulis, Frank Hartley, Daniel Wilson, Victor White, Aidan Shori, Steven Nguyen, Min Zhang, and Martin Feldman, "Blazed grating fabrication through gray-scale Xray lithography," Opt. Express 11, 270-281 (2003)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-11-3-270


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