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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 6 — Mar. 24, 2003
  • pp: 610–616

Thickness monitoring of optical filters for DWDM applications

Kamil Postava, Jaromír Pištora, Masashi Kojima, Kazuo Kikuchi, Kazuhiro Endo, and Tomuo Yamaguchi  »View Author Affiliations

Optics Express, Vol. 11, Issue 6, pp. 610-616 (2003)

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A method for thickness monitoring and turning-point prediction during deposition of narrow band pass optical filters (NBPF) for dense-wavelength-division-multiplexing (DWDM) applications is proposed. The method is based on a recurrent approach, with relative transmittance fitting, and includes partial coherence and monochromator bandpass effects. We show that the partial coherence effects in thin film structures are significant and can not be neglected. The proposed method is applicable for precise thickness monitoring and deposition control of any complex multilayer coating.

© 2003 Optical Society of America

OCIS Codes
(060.1810) Fiber optics and optical communications : Buffers, couplers, routers, switches, and multiplexers
(060.4230) Fiber optics and optical communications : Multiplexing
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Research Papers

Original Manuscript: February 26, 2003
Revised Manuscript: March 17, 2003
Published: March 24, 2003

Kamil Postava, Jaromır Pistora, Masashi Kojima, Kazuo Kikuchi, Kazuhiro Endo, and Tomuo Yamaguchi, "Thickness monitoring of optical filters for DWDM applications," Opt. Express 11, 610-616 (2003)

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