Novel laser datum system for nanometric profilometry for large optical surfaces
Optics Express, Vol. 11, Issue 6, pp. 624-631 (2003)
http://dx.doi.org/10.1364/OE.11.000624
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Abstract
We report a new laser datum system for precision point-by-point profilometry of large curved optical surfaces. The laser datum is sensed by a nulling quadrant photodiode mounted in a flexural system with hybrid actuators, which also carries interferometer reference optics for vertical and horizontal displacement measurement. The flexure characteristics such as cross-talk and hysteresis were investigated. The optimum environmental conditions for the active position-control were studied, and closed-loop control was modeled. The experimental results for compensation accuracy showed a repeatability of ± 4 nm rms, the compensation accuracy of 10 nm (vertical channel) and 20 nm (horizontal channel).
© 2003 Optical Society of America
OCIS Codes
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
ToC Category:
Research Papers
History
Original Manuscript: February 19, 2003
Revised Manuscript: March 18, 2003
Published: March 24, 2003
Citation
Ho-Soon Yang, Sug-Whan Kim, and David Walker, "Novel laser datum system for nanometric profilometry for large optical surfaces," Opt. Express 11, 624-631 (2003)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-11-6-624
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References
- CELT, The California Extremely Large Telescope, <a href="http://celt.ucolick.org/">http://celt.ucolick.org/</a>
- National Physical Laboratory, NPL and the EURO50 telescope, <a href="http://www.npl.co.uk/length/dmet/euro50.html">http://www.npl.co.uk/length/dmet/euro50.html</a>
- OWL, 100 m OWL telescope concept, <a href="http://www.eso.org/projects/owl/owl_design.html">http://www.eso.org/projects/owl/owl_design.html</a>
- D.D.Walker et al., �??The primary and secondary mirrors for the proposed Euro50 telescope,�?? Design Study Report (2002).
- D. J. Whitehouse, Handbook of surface metrology (IOP, 1995), Chap. 4.
- W.T.Estler, �??Calibration and use of optical straightedges in the metrology of precision machines,�?? Opt. Eng. 24, 372-379 (1985).
- D.S.Anderson, J.H.Burge, �??Swing-arm Profilometry of Aspherics,�?? in Optical manufacturing and testing, V.J.Doherty and H.Stahl, Proc. SPIE 2536, 169-179 (1995). [CrossRef]
- P.Z.Takacs, S.-N. Qian and J. Colbert, �??Design of a long-trace surface profiler,�?? in Metrology:Figure and Finish, B.E.Truax, Proc. SPIE 749, 59-64 (1987). [CrossRef]
- P.Z.Takacs, S.C.K. Feng, E. L. Church, S. -N. Qian, W. -M. Liu, �??Long trace profile measurements on cylindrical aspheres,�?? in Advances in Fabrication and Metrology for optics and large optics, J.B.Arnold and R.E.Parks, Proc. SPIE 966, 354-364 (1989). [CrossRef]
- S.-N. Qian, W.Jark, P. Z. Takacs, �??The penta-prism LTP: A long-trace-profiler with stationary optical head and moving penta prism,�?? Rev. Sci. Instrum. 66, 2562-2569 (1995). [CrossRef]
- P.Z.Takacs, �??Significant Improvements in Long Trace Profiler Measurement Performance,�?? in Optics for High-brightness synchrotron radiation beamlinseII, L.E.Berman and J.R.Arthur., Proc. SPIE 2856, 236- 245 (1996). [CrossRef]
- S.Qian, G.Sostero, P.Z.Takacs, �??Precision calibration and systematic error reduction in the long trace profiler,�?? Opt. Eng. 39, 304-310 (2000) [CrossRef]
- M. Virdee, �??Non-contacting straightness measurementto nanometer accuracy,�?? Int. J. Mach. Tools Manufact. 35, 157-164 (1995). [CrossRef]
- K. S. Lee Neville, Yimin Cai, Ajay Joneja, �??High-resolution multidimensional displacement monitoring system,�?? Opt. Eng. 36, 2287-2293 (1997). [CrossRef]
- K. S. Lee Neville, Yimin Cai, S. F. Wong Alfred, Ajay Joneja, �??Ultra-high-resolution optical monitoring system using a noise cancellation technique,�?? Opt. Eng. 36, 3353-3359 (1997). [CrossRef]
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