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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 6 — Mar. 24, 2003
  • pp: 624–631

Novel laser datum system for nanometric profilometry for large optical surfaces

Ho-Soon Yang, Sug-Whan Kim, and David Walker  »View Author Affiliations

Optics Express, Vol. 11, Issue 6, pp. 624-631 (2003)

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We report a new laser datum system for precision point-by-point profilometry of large curved optical surfaces. The laser datum is sensed by a nulling quadrant photodiode mounted in a flexural system with hybrid actuators, which also carries interferometer reference optics for vertical and horizontal displacement measurement. The flexure characteristics such as cross-talk and hysteresis were investigated. The optimum environmental conditions for the active position-control were studied, and closed-loop control was modeled. The experimental results for compensation accuracy showed a repeatability of ± 4 nm rms, the compensation accuracy of 10 nm (vertical channel) and 20 nm (horizontal channel).

© 2003 Optical Society of America

OCIS Codes
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Research Papers

Original Manuscript: February 19, 2003
Revised Manuscript: March 18, 2003
Published: March 24, 2003

Ho-Soon Yang, Sug-Whan Kim, and David Walker, "Novel laser datum system for nanometric profilometry for large optical surfaces," Opt. Express 11, 624-631 (2003)

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