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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 9 — May. 5, 2003
  • pp: 975–979

Method for correcting the joint error of a laser writer

Yongjun Xie, Zhenwu Lu, and Fengyou Li  »View Author Affiliations


Optics Express, Vol. 11, Issue 9, pp. 975-979 (2003)
http://dx.doi.org/10.1364/OE.11.000975


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Abstract

We present what we believe to be a new method for correcting the joint error of a laser writer without reduction of throughput. By digitization, we optimize the intensity data of the incident beam at the vicinity of the start point and the end point. The joint error will not be sensitive to lengthening of the start or end point by optimization. The advantage of this method over multipass writing and error scattering is that it requires only a single pass, and thus 80% of the fabrication time will be saved. Experimentation shows the method to be effective.

© 2003 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.3740) Optical design and fabrication : Lithography

ToC Category:
Research Papers

History
Original Manuscript: March 27, 2003
Revised Manuscript: April 14, 2003
Published: May 5, 2003

Citation
Yongjun Xie, Zhenwu Lu, and Fengyou Li, "Method for correcting the joint error of a laser writer," Opt. Express 11, 975-979 (2003)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-11-9-975


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References

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