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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 9 — May. 5, 2003
  • pp: 992–995

Fabrication of large diffractive optical elements in thick film on a concave lens surface

Yongjun Xie, Zhenwu Lu, and Fengyou Li  »View Author Affiliations

Optics Express, Vol. 11, Issue 9, pp. 992-995 (2003)

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We demonstrate experimentally the technique of fabricating large diffractive optical elements (DOEs) in thick film on a concave lens surface (mirrors) with precise alignment by using the strategy of double exposure. We adopt the method of double exposure to overcome the difficulty of processing thick photoresist on a large curved substrate. A uniform thick film with arbitrary thickness on a concave lens can be obtained with this technique. We fabricate a large concentric circular grating with a 10-µm period on a concave lens surface in film with a thickness of 2.0 µm after development. It is believed that this technique can also be used to fabricate larger DOEs in thicker film on the concave or convex lens surface with precise alignment. There are other potential applications of this technique, such as fabrication of micro-optoelectromechanical systems (MOEMS) or microelectromechanical systems (MEMS) and fabrication of microlens arrays on a large concave lens surface or convex lens surface with precise alignment.

© 2003 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.3740) Optical design and fabrication : Lithography

ToC Category:
Research Papers

Original Manuscript: March 6, 2003
Revised Manuscript: April 14, 2003
Published: May 5, 2003

Yongjun Xie, Zhenwu Lu, and Fengyou Li, "Fabrication of large diffractive optical elements in thick film on a concave lens surface," Opt. Express 11, 992-995 (2003)

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