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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 16 — Aug. 9, 2004
  • pp: 3707–3712

Spontaneously generated sinusoidallike structures on Ti–Ni thin film under focused ion-beam bombardment

Yongqi Fu and Ngoi Kok Ann Bryan  »View Author Affiliations


Optics Express, Vol. 12, Issue 16, pp. 3707-3712 (2004)
http://dx.doi.org/10.1364/OPEX.12.003707


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Abstract

A new fabrication method for a sinusoidallike structure is described. The sinusoidal structure can be spontaneously self-formed on the surface of a substrate by focused ion-beam bombardment with raster scanning and an ion incident angle perpendicular to the sample surface (normal incidence). The substrate material is a silicon wafer coated with 2-µm-thick Ti–Ni thin film. We show by measurement and analysis of the grating characteristics at the working wavelength range from 50 to 1500 nm that the technique of self-organized formation is a valid approach for microfabrication of diffractive structures, and the spontaneously generated structure under ion bombardment is applicable for a sinusoidal grating that functions from the ultraviolet to the near-infrared wavelength range.

© 2004 Optical Society of America

OCIS Codes
(040.3060) Detectors : Infrared
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1970) Diffraction and gratings : Diffractive optics
(220.0220) Optical design and fabrication : Optical design and fabrication

ToC Category:
Research Papers

History
Original Manuscript: June 14, 2004
Revised Manuscript: July 1, 2004
Published: August 9, 2004

Citation
Yongqi Fu and Ngoi Bryan, "Spontaneously generated sinusoidallike structures on Ti�??Ni thin film under focused ion-beam bombardment," Opt. Express 12, 3707-3712 (2004)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-12-16-3707


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References

  1. T. Geue, O. Henneberg, and U. Pietsch, ???X-ray reflectivity from sinusoidal surface relief gratings,??? Cryst. Res. Technol. 37, 770???776 (2002). [CrossRef]
  2. P. Rochon, E. Batalla, and A. Natansohn, ???Optically induced surface gratings on azoaromatic polymer films,??? Appl. Phys. Lett. 66, 136???138 (1995). [CrossRef]
  3. D. Y. Kim, S. K. Tripathy, L. Li, and J. Kumar, ???Laser-induced holographic surface relief gratings on nonlinear optical polymer films,??? Appl. Phys. Lett. 66, 1166???1168 (1995). [CrossRef]
  4. Y. Fu, N. K. A. Bryan, and W. Zhou, ???Self-organized formation of a blazed-grating- like structure on Si(100) induced by focused ion-beam scanning,??? Opt. Express 12, 227???233 (2004) <a href="http://www.opticsexpress.org/abstract.cfm?URI=OPEX-12-2-227">http://www.opticsexpress.org/abstract.cfm?URI=OPEX-12-2-227</a>. [CrossRef] [PubMed]
  5. For commonly used software based on the modified integral method for simulation and analysis of gratings, see <a href="http://www.pcgrate.com">http://www.pcgrate.com</a>
  6. L. I. Goray and J. F. Seely, ???Efficiencies of master, replica, and multilayer gratings for the soft-x-ray ???extreme-ultraviolet range: modeling based on the modified integral method and comparisons with measurements,??? Appl. Opt. 41, 1434???1445 (2002). [CrossRef] [PubMed]
  7. M. P. Kowalski, J. F. Seely, L. I. Goray, W. R. Hunter, and J. C. Rife, ???Comparison of the calculated and the measured efficiencies of a normal-incidence grating in the 125???225-?? wavelength range,??? Appl. Opt. 36, 8939???8943 (1997). [CrossRef]
  8. L. I. Goray, ???Modified integral method for weak convergence problems of light scattering on relief grating,??? in Diffractive and Holographic Technologies for Integrated Photonic Systems, R. I. Sutherland, D. W. Prather, and I. Cindrich, eds., Proc. SPIE 4291, 1???12 (2001).
  9. L. I. Goray and S. Yu. Sadov, ???Numerical modeling of nonconformal gratings by the modified integral method,??? in Diffractive Optics and Micro-Optics, Vol. 75 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2002), pp. 365???379.
  10. E. D. Palik and G. Ghosh, Electronic Handbook of Optical Constants of Solid (Academic, San Diego, Calif., 1999).

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