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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 16 — Aug. 9, 2004
  • pp: 3840–3847

Inorganic positive uniaxial films fabricated by serial bideposition

Ian Hodgkinson, Qi hongWu, Lakshman De Silva, and Matthew Arnold  »View Author Affiliations

Optics Express, Vol. 12, Issue 16, pp. 3840-3847 (2004)

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The physical vapor deposition process of serial bideposition is adapted to the fabrication of uniaxial optical coatings. During the coating process the vapor impinges at an angle of incidence of about 70° on to the substrate, and a stepwise axial rotation with 90° increments causes a columnar structure to grow normal to the substrate. Symmetry considerations that follow from the choice of 90° for the stepwise increment ensure that the film is achiral and has negligible in-plane linear birefringence. Optical characterization techniques confirm that films of tantalum oxide, titanium oxide and zirconium oxide are positive uniaxial with ne -no in the range 0.10 to 0.14.

© 2004 Optical Society of America

OCIS Codes
(160.1190) Materials : Anisotropic optical materials
(260.1440) Physical optics : Birefringence
(260.5430) Physical optics : Polarization
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Research Papers

Original Manuscript: June 10, 2004
Revised Manuscript: July 29, 2004
Published: August 9, 2004

Ian Hodgkinson, Qi hong Wu, Lakshman De Silva, and Matthew Arnold, "Inorganic positive uniaxial films fabricated by serial bideposition," Opt. Express 12, 3840-3847 (2004)

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