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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 17 — Aug. 23, 2004
  • pp: 3894–3899

Fabrication of varied-line-spacing grating by elastic medium

Yongjun Xie, Xiangdong Xu, Yilin Hong, Ying Liu, Shaojun Fu, Shiping He, and Bangkun Jin  »View Author Affiliations

Optics Express, Vol. 12, Issue 17, pp. 3894-3899 (2004)

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We demonstrate a method of fabricating varied-line-spacing grating by employing elastic medium with variable vertical section. The advantages of this technique include continuous variation of line spacing, high fabrication efficiency, low cost, etc. It is very difficult or impractical to produce this variation of line spacing by traditional interference lithography. This kind of grating can be used in an optical position sensor to improve the precision of the sensor.

© 2004 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.3740) Optical design and fabrication : Lithography

ToC Category:
Research Papers

Original Manuscript: July 2, 2004
Revised Manuscript: July 18, 2004
Published: August 23, 2004

Yongjun Xie, Xiangdong Xu, Yilin Hong, Ying Liu, Shaojun Fu, Shiping He, and Bangkun Jin, "Fabrication of varied-line-spacing grating by elastic medium," Opt. Express 12, 3894-3899 (2004)

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