Fabrication of varied-line-spacing grating by elastic medium
Optics Express, Vol. 12, Issue 17, pp. 3894-3899 (2004)
http://dx.doi.org/10.1364/OPEX.12.003894
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Abstract
We demonstrate a method of fabricating varied-line-spacing grating by employing elastic medium with variable vertical section. The advantages of this technique include continuous variation of line spacing, high fabrication efficiency, low cost, etc. It is very difficult or impractical to produce this variation of line spacing by traditional interference lithography. This kind of grating can be used in an optical position sensor to improve the precision of the sensor.
© 2004 Optical Society of America
OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.3740) Optical design and fabrication : Lithography
ToC Category:
Research Papers
History
Original Manuscript: July 2, 2004
Revised Manuscript: July 18, 2004
Published: August 23, 2004
Citation
Yongjun Xie, Xiangdong Xu, Yilin Hong, Ying Liu, Shaojun Fu, Shiping He, and Bangkun Jin, "Fabrication of varied-line-spacing grating by elastic medium," Opt. Express 12, 3894-3899 (2004)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-12-17-3894
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References
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