Low propagation loss of the waveguides in fused quartz by oxygen ion implantation
Optics Express, Vol. 12, Issue 20, pp. 4675-4680 (2004)
http://dx.doi.org/10.1364/OPEX.12.004675
Enhanced HTML 
Acrobat PDF (444 KB)
Abstract
The planar waveguides have been fabricated in fused quartz by 3.0 MeV oxygen ion implantation at dose of 1×1015ions/cm2. The guiding modes were observed at wavelengths of both 633 nm and 1539 nm before and after annealing at 320°C, 450°C and 500°C in 60 min characterized by the prism-coupling method. The width of the waveguide structure induced by oxygen ion implantation is about 3 microns. After suitable annealing, the minimum propagation loss of the waveguide in fused quartz can be reduced to -0.14 dB/cm.
© 2004 Optical Society of America
OCIS Codes
(130.2790) Integrated optics : Guided waves
(160.2750) Materials : Glass and other amorphous materials
(230.7390) Optical devices : Waveguides, planar
ToC Category:
Research Papers
History
Original Manuscript: August 11, 2004
Revised Manuscript: September 15, 2004
Published: October 4, 2004
Citation
Xue-Lin Wang, Ke-Ming Wang, Gang Fu, Shi-Ling Li, Ding-Yu Shen, Hong-Ji Ma, and Rui Nie, "Low propagation loss of the waveguides in fused quartz by oxygen ion implantation," Opt. Express 12, 4675-4680 (2004)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-12-20-4675
Sort: Journal | Reset
References
- I. K. Naik, �??Low-loss integrated optical waveguides fabricated by nitrogen ion implantation,�?? Appl. Phys. Lett. 46(6), 519-521 (1983). [CrossRef]
- E. V. K. Rao and D. Moutonnet, �??Buried optical waveguides in fused silica by high-energy oxygen ion implantation,�?? J. Appl. Phys. 46, 955-957 (1975). [CrossRef]
- P. D. Townsend, P. J. Chandler, and L. Zhang, Optical Effects of Ion Implantation (Cambridge University Press, Cambridge, 1994). [CrossRef]
- Ch. Buchal, �??Ion implantation for photorefractive devices and optical emitters,�?? Nucl. Instrum. Methods B 166�??167, 743-749(2000). [CrossRef]
- P. D. Townsend, �??Development of ion implantation for optical applications,�?? Vacuum 51, 301-304 (1998). [CrossRef]
- F. Chen, X. L. Wang, K. M. Wang, Q. M. Lu and D. Y. Shen, �??Optical waveguides formed in Nd:YVO4 by MeV Si+ implantation,�?? Appl. Phys. Lett. 80, 3473-3745 (2002). [CrossRef]
- F. Chen, X. L. Wang, K. M. Wang, Q. M. Lu and D. Y. Shen, �??Ion-implanted Nd:YVO4 planar waveguide: refractive-index characterization and propagation mode reduction,�?? Opt. Lett. 27, 1111-1113 (2002) [CrossRef]
- F. Chen, K. M. Wang, X. L. Wang, X. S. Li, Q. M. Lu, D. Y. Shen and R. Nie, �??Monomode, nonleaky planar waveguides in a Nd3+-doped silicate glass produced by silicon ion implantation at low doses,�?? J. Appl. Phys. 92, 2959-2961 (2002). [CrossRef]
- D. L. Zhang, E. Y. B. Pun, �??Accurate measurement of 1.5 µm lifetime of Er3+ in LiNbO3 crystals and waveguides,�?? J. Appl. Phys. 94, 1339-1346 (2003). [CrossRef]
- S. L. Li, K. M. Wang, F. Chen, X. L. Wang and G. Fu, �??Monomode optical waveguide excited at 1540 nm in LiNbO3 formed by MeV carbon ion implantation at low doses,�?? Opt. Express 12, 747-752 (2004), <a href="http://www.opticsexpress.org/abstract.cfm?URI=OPEX-12-5-747">http://www.opticsexpress.org/abstract.cfm?URI=OPEX-12-5-747</a> [CrossRef] [PubMed]
- C. M. Johnson, M. C. Ridgway and P. W. Leech, �??Thermal annealing of implantation-induced compaction for improved silica waveguide performance,�?? Appl. Phys. Lett. 69, 984-986 (1996). [CrossRef]
- S. Durra, H.E. Jackson, J.T. Boyd, R.L. Davis and F.S. Hickernell, �??CO2 laser annealing of Si3N4, Nb2O5, and Ta2O5 thin-film optical waveguides to achieve scattering loss reduction,�?? IEEE J. Quantum Electron. 18, 800-807 (1982) [CrossRef]
- C. C. Davis, Lasers and Electro-Optics (Cambridge University Press, Cambridge, 1996).
- P. J. Chandler and F. L. Lama, �??A new approach to the determination of planar waveguide profiles by means of a non-stationary mode index calculation,�?? Opt. Acta 33, 127-142 (1986). [CrossRef]
Cited By |
 Alert me when this paper is cited |
OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.
Related Journal Articles 
- Reflectivity properties of an abruptly ended asymmetrical slab waveguide for the case of transverse magnetic modes (JOSAA)
- Planar Waveguides Formed by Ag+-Na+ Ion Exchange in Nonlinear Optical Glasses: Diffusion and Optical Properties (AO)
- Low propagation loss of the waveguides in fused quartz by oxygen ion implantation: errata (OE)
- Si-CMOS-compatible lift-off fabrication of low-loss planar chalcogenide waveguides (OE)
- Optical loss reduction in high-index-contrast chalcogenide glass waveguides via thermal reflow (OE)
Related Conference Papers
- Low-Loss Compact Silica-Based AWG Using Deep Ridge Waveguide
- Highly Integrated PLC-Type Optical Switches for OADM and OXC Systems
- High-performance interleave filters composed of planar lightwave circuits on silicon
- Poling of Planar Silica Waveguides
- Photonic bandgap confinement in an all-solid tellurite glass photonic crystal fiber
- Photonic bandgap confinement in an all-solid tellurite glass photonic crystal fiber
« Previous Article | Next Article »
OSA is a member of 