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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 20 — Oct. 4, 2004
  • pp: 4681–4697

An integral approach to phase shifting interferometry using a super-resolution frequency estimation method

Abhijit Patil, Rajesh Langoju, and Pramod Rastogi  »View Author Affiliations

Optics Express, Vol. 12, Issue 20, pp. 4681-4697 (2004)

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The objective of this paper is to describe an integral approach -based on the use of a super-resolution frequency estimation method - to phase shifting interferometry, starting from phase step estimation to phase evaluation at each point on the object surface. Denoising is also taken into consideration for the case of a signal contaminated with white Gaussian noise. The other significant features of the proposal are that it caters to the presence of multiple PZTs in an optical configuration, is capable of determining the harmonic content in the signal and effectively eliminating their influence on measurement, is insensitive to errors arising from PZT miscalibration, is applicable to spherical beams, and is a robust performer even in the presence of white Gaussian intensity noise.

© 2004 Optical Society of America

OCIS Codes
(090.2880) Holography : Holographic interferometry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Research Papers

Original Manuscript: August 17, 2004
Revised Manuscript: September 15, 2004
Published: October 4, 2004

Abhijit Patil, Rajesh Langoju, and Pramod Rastogi, "An integral approach to phase shifting interferometry using a super-resolution frequency estimation method," Opt. Express 12, 4681-4697 (2004)

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