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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 21 — Oct. 18, 2004
  • pp: 5013–5021

Bipolar absolute differential confocal approach to higher spatial resolution

Weiqian Zhao, Jiubin Tan, and Lirong Qiu  »View Author Affiliations

Optics Express, Vol. 12, Issue 21, pp. 5013-5021 (2004)

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By use of a superresolution pupil filtering technique to achieve a lateral optical superresolution and a differential confocal microscopy technique to achieve an axial resolution at the nanometer level, we propose a high spatial resolution bipolar absolute differential confocal approach for the ultraprecision measurement of three-dimensional microstructures. The feasibility of the proposed approach has been proved by use of a shaped annular beam differential confocal microscopy system. The experimental results indicate that the lateral and axial resolutions of the shaped annular beam differential confocal system are better than 0.2 μm and 2 nm, respectively, when λ=632.8 nm, ε=0.5, uM =6.95, and with a 0.85 numerical aperture.

© 2004 Optical Society of America

OCIS Codes
(100.6640) Image processing : Superresolution
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(180.1790) Microscopy : Confocal microscopy

ToC Category:
Research Papers

Original Manuscript: August 13, 2004
Revised Manuscript: September 26, 2004
Published: October 18, 2004

Weiqian Zhao, Jiubin Tan, and Lirong Qiu, "Bipolar absolute differential confocal approach to higher spatial resolution," Opt. Express 12, 5013-5021 (2004)

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