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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 21 — Oct. 18, 2004
  • pp: 5117–5124

Direct spectral phase function calculation for dispersive interferometric thickness profilometry

Daesuk Kim and Soohyun Kim  »View Author Affiliations

Optics Express, Vol. 12, Issue 21, pp. 5117-5124 (2004)

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A direct spectral phase function calculation method based on spectral phase shifting is described. We show experimentally that the direct phase function calculation method can provide a simple and fast solution in calculating the spectral phase function, while maintaining the same level of accurate measurement capability as that based on the Fourier transform approach.

© 2004 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation

ToC Category:
Research Papers

Original Manuscript: September 8, 2004
Revised Manuscript: October 4, 2004
Published: October 18, 2004

Daesuk Kim and Soohyun Kim, "Direct spectral phase function calculation for dispersive interferometric thickness profilometry," Opt. Express 12, 5117-5124 (2004)

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