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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 21 — Oct. 18, 2004
  • pp: 5140–5145

Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching

Yinlan Ruan, Weitang Li, Ruth Jarvis, Nathan Madsen, Andrei Rode, and Barry Luther-Davies  »View Author Affiliations

Optics Express, Vol. 12, Issue 21, pp. 5140-5145 (2004)

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We report the fabrication and characterization of rib chalcogenide waveguides produced by dry etching with CF4 and O2. The high index contrast waveguides (Δn ~ 1) show a minimum propagation loss of 0.25 dB/cm. The high refractive nonlinearity of ~ 100 times silica in As2S3 allowed observation of a π phase shift due to self-phase modulation of an 8 ps duration 1573 nm pulse in a 5 cm long waveguide.

© 2004 Optical Society of America

OCIS Codes
(230.7370) Optical devices : Waveguides
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:
Research Papers

Original Manuscript: August 20, 2004
Revised Manuscript: October 6, 2004
Published: October 18, 2004

Yinlan Ruan, Weitang Li, Ruth Jarvis, Nathan Madsen, Andrei Rode, and Barry Luther-Davies, "Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching," Opt. Express 12, 5140-5145 (2004)

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