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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 24 — Nov. 29, 2004
  • pp: 6040–6045

Null ellipsometer with phase modulation

K. Postava, A. Maziewski, T. Yamaguchi, R. Ossikovski, Š Višňovskí, and J. Pištora  »View Author Affiliations

Optics Express, Vol. 12, Issue 24, pp. 6040-6045 (2004)

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A new null ellipsometer is described that uses photoelastic modulator (PEM). The phase modulation adds a good signal-to-noise ratio, high sensitivity, and linearity near null positions to the traditional high-precision nulling system. The ellipsometric angles Δ and ψ are obtained by azimuth measurement of the analyzer and the polarizer-PEM system, for which the first and second harmonics of modulator frequency cross the zeros. We show that the null system is insensitive to ellipsometer misadjustment and component imperfections and modulator calibration is not needed. In addition, a fast ellipsometer mode for fine changes measurement of ellipsometric angles is proposed.

© 2004 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(260.2130) Physical optics : Ellipsometry and polarimetry

ToC Category:
Research Papers

Original Manuscript: November 8, 2004
Revised Manuscript: November 18, 2004
Published: November 29, 2004

K. Postava, A. Maziewski, T. Yamaguchi, R. Ossikovski, S. Viš�?ovsky, and J. Pištora, "Null ellipsometer with phase modulation," Opt. Express 12, 6040-6045 (2004)

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