Microring-resonator-based add-drop filters in SiN: fabrication and analysis
Optics Express, Vol. 12, Issue 7, pp. 1437-1442 (2004)
http://dx.doi.org/10.1364/OPEX.12.001437
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Abstract
Third-order add-drop filters based on series-coupled microring resonators were fabricated in silicon-rich silicon nitride with accurate dimensional control and negligible sidewall roughness. For the first time, a low 3 dB drop loss is demonstrated with a wide 24 nm free-spectral-range in a high-order microring filter without using the Vernier effect. The spectral response is matched by rigorous numerical simulation, and non-idealities in the drop- and through-port responses are shown to be of design origin and to be correctable.
© 2004 Optical Society of America
OCIS Codes
(060.4230) Fiber optics and optical communications : Multiplexing
(130.0130) Integrated optics : Integrated optics
(230.4000) Optical devices : Microstructure fabrication
(230.5750) Optical devices : Resonators
ToC Category:
Research Papers
History
Original Manuscript: March 9, 2004
Revised Manuscript: March 26, 2004
Published: April 5, 2004
Citation
Tymon Barwicz, Miloš Popovi�?, Peter Rakich, Michael Watts, Hermann Haus, Erich Ippen, and Henry Smith, "Microring-resonator-based add-drop filters in SiN: fabrication and analysis," Opt. Express 12, 1437-1442 (2004)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-12-7-1437
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References
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