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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 8 — Apr. 19, 2004
  • pp: 1583–1591

Basic structures for photonic integrated circuits in Silicon-on-insulator

W. Bogaerts, D. Taillaert, B. Luyssaert, P. Dumon, J. Van Campenhout, P. Bienstman, D. Van Thourhout, R. Baets, V. Wiaux, and S. Beckx  »View Author Affiliations


Optics Express, Vol. 12, Issue 8, pp. 1583-1591 (2004)
http://dx.doi.org/10.1364/OPEX.12.001583


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Abstract

For the compact integration of photonic circuits, wavelength-scale structures with a high index contrast are a key requirement. We developed a fabrication process for these nanophotonic structures in Silicon-on-insulator using CMOS processing techniques based on deep UV lithography. We have fabricated both photonic wires and photonic crystal waveguides and show that, with the same fabrication technique, photonic wires have much less propagation loss than photonic crystal waveguides. Measurements show losses of 0.24dB/mm for photonic wires, and 7.5dB/mm for photonic crystal waveguides. To tackle the coupling to fiber, we studied and fabricated vertical fiber couplers with coupling efficiencies of over 21%. In addition, we demonstrate integrated compact spot-size converters with a mode-to-mode coupling efficiency of over 70%.

© 2004 Optical Society of America

OCIS Codes
(220.4610) Optical design and fabrication : Optical fabrication
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:
Focus Issue: Photonic crystals and holey fibers

History
Original Manuscript: March 1, 2004
Revised Manuscript: March 26, 2004
Published: April 19, 2004

Citation
W. Bogaerts, D. Taillaert, B. Luyssaert, P. Dumon, J. Van Campenhout, P. Bienstman, D. Van Thourhout, R. Baets, V. Wiaux, and S. Beckx, "Basic structures for photonic integrated circuits in Silicon-on-insulator," Opt. Express 12, 1583-1591 (2004)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-12-8-1583


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References

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