OSA's Digital Library

Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 8 — Apr. 19, 2004
  • pp: 1583–1591

Basic structures for photonic integrated circuits in Silicon-on-insulator

W. Bogaerts, D. Taillaert, B. Luyssaert, P. Dumon, J. Van Campenhout, P. Bienstman, D. Van Thourhout, R. Baets, V. Wiaux, and S. Beckx  »View Author Affiliations

Optics Express, Vol. 12, Issue 8, pp. 1583-1591 (2004)

View Full Text Article

Enhanced HTML    Acrobat PDF (4156 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



For the compact integration of photonic circuits, wavelength-scale structures with a high index contrast are a key requirement. We developed a fabrication process for these nanophotonic structures in Silicon-on-insulator using CMOS processing techniques based on deep UV lithography. We have fabricated both photonic wires and photonic crystal waveguides and show that, with the same fabrication technique, photonic wires have much less propagation loss than photonic crystal waveguides. Measurements show losses of 0.24dB/mm for photonic wires, and 7.5dB/mm for photonic crystal waveguides. To tackle the coupling to fiber, we studied and fabricated vertical fiber couplers with coupling efficiencies of over 21%. In addition, we demonstrate integrated compact spot-size converters with a mode-to-mode coupling efficiency of over 70%.

© 2004 Optical Society of America

OCIS Codes
(220.4610) Optical design and fabrication : Optical fabrication
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:
Focus Issue: Photonic crystals and holey fibers

Original Manuscript: March 1, 2004
Revised Manuscript: March 26, 2004
Published: April 19, 2004

W. Bogaerts, D. Taillaert, B. Luyssaert, P. Dumon, J. Van Campenhout, P. Bienstman, D. Van Thourhout, R. Baets, V. Wiaux, and S. Beckx, "Basic structures for photonic integrated circuits in Silicon-on-insulator," Opt. Express 12, 1583-1591 (2004)

Sort:  Journal  |  Reset  


  1. J. D. Joannopolous, R. Meade, and J.Winn, Photonic Crystals - Molding the Flow of Light (Princeton University Press, Princeton, N.J., 1995).
  2. �??SOITEC�??s Unibond(R) process,�?? Microelectronics Journal 27(4/5), R36 (1996).
  3. W. Bogaerts, V.Wiaux, D. Taillaert, S. Beckx, B. Luyssaert, P. Bienstman, and R. Baets, �??Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography,�?? IEEE J. Sel. Top. Quantum Electron. 8, 928�??934 (2002). [CrossRef]
  4. W. Bogaerts, V. Wiaux, P. Dumon, D. Taillaert, J. Wouters, S. Beckx, J. Van Campenhout, B. Luyssaert, D. Van Thourhout, and R. Baets, �??Large-scale production techniques for photonic nanostructures,�?? Proc. SPIE 5225, 101�??112 (2003). [CrossRef]
  5. J. Arentoft, T. Sondergaard, M. Kristensen, A. Boltasseva, M. Thorhauge, and L. Frandsen, �??Low-loss silicon-on-insulator photonic crystal waveguides,�?? Electron. Lett. 38, 274�??275 (2002). [CrossRef]
  6. M. Vaughan. The Fabry-Perot interferometer (Adam Hilger, Bristol, 1989).
  7. P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, �??Low-loss SOI Photonic Wires and Ring Resonators Fabricated with Deep UV Lithography,�?? accepted for publication in Photonics Technology Letters (2004).
  8. T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, �??Low loss mode size converter from 0.3 µm square Si waveguides to singlemode fibres,�?? Electron. Lett. 38, 1669�??1700 (2002). [CrossRef]
  9. D. Taillaert, W. Bogaerts, P. Bienstman, T. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, �??An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,�?? IEEE J. Quantum Electron. 38, 949�??955, (2002). [CrossRef]
  10. M. M. Spühler, B. J. Offrein, G.-L. Bona, R. Germann, I. Massarek, and D. Erni, �??A Very Short Planar Silica Spot-Size Converter using a Nonperiodic Segmented Waveguide,�?? J. Lightwave Technol. 16, 1680 (1998). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Supplementary Material

» Media 1: GIF (289 KB)     
» Media 2: GIF (538 KB)     

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited