OSA's Digital Library

Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 8 — Apr. 19, 2004
  • pp: 1622–1631

Losses in single-mode silicon-on-insulator strip waveguides and bends

Yurii A. Vlasov and Sharee J. McNab  »View Author Affiliations

Optics Express, Vol. 12, Issue 8, pp. 1622-1631 (2004)

View Full Text Article

Enhanced HTML    Acrobat PDF (839 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We report the fabrication and accurate measurement of propagation and bending losses in single-mode silicon waveguides with submicron dimensions fabricated on silicon-on-insulator wafers. Owing to the small sidewall surface roughness achieved by processing on a standard 200mm CMOS fabrication line, minimal propagation losses of 3.6±0.1dB/cm for the TE polarization were measured at the telecommunications wavelength of 1.5µm. Losses per 90° bend are measured to be 0.086±0.005dB for a bending radius of 1µm and as low as 0.013±0.005dB for a bend radius of 2µm. These record low numbers can be used as a benchmark for further development of silicon microphotonic components and circuits.

© 2004 Optical Society of America

OCIS Codes
(230.7370) Optical devices : Waveguides
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:
Focus Issue: Photonic crystals and holey fibers

Original Manuscript: February 3, 2004
Revised Manuscript: April 12, 2004
Published: April 19, 2004

Yurii Vlasov and Sharee McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Express 12, 1622-1631 (2004)

Sort:  Journal  |  Reset  


  1. Y. Hibino, �??Silica-Based Planar Lightwave Circuits and Their Applications,�?? MRS Bulletin May 2003, p.365 (2003).
  2. T. Shibata, M. Okuno, T. Goh, T. Watanabe, M. Yasu, M. Itoh, M. Ishii, Y. Hibino, A. Sugita, and A. Himeno,�??Silica-Based Waveguide-Type 16x16 Optical Switch Module Incorporating Driving Circuits,�?? IEEE Phot. Techn. Lett. 15, 1300 (2003). [CrossRef]
  3. G.-L. Bona, R. Germann, and B. J. Offrein, �??SiON high refractive-index waveguide and planar lightwave circuits,�?? IBM J. Res.Develop. 47, 239 (2003). [CrossRef]
  4. S. J. McNab, N. Moll and Yu. A. Vlasov, �??Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,�?? Opt. Express 11, 2927 (2003). <a href="http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-22-2927">http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-22-2927</a>. [CrossRef] [PubMed]
  5. K. K. Lee, D. R. Lim, H.-C. Luan, A. Agarwal, J. Foresi, and L. C. Kimerling �??Effect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model,�?? Appl. Phys. Lett. 77, 1617 (2000). [CrossRef]
  6. K. K. Lee, D. R. Lim, and L. C. Kimerling, �??Fabrication of ultralow-loss Si/SiO waveguides by roughness reduction,�?? Opt. Lett. 26, 1888 (2001). [CrossRef]
  7. K. K. Lee, �??Transmission and routing of optical signals in on-chip waveguides for silicon microphotonics,�?? PhD thesis, MIT (2001).
  8. D. R. Lim, �??Device integration for silicon microphotonics platforms,�?? PhD thesis, MIT (2000).
  9. A. Sakai, G. Hara, and T. Baba, �??Propagation characteristics of ultrahigh - optical waveguide on siliconon-insulator substrate," Jpn. J. Appl. Phys. Part 2, 4B, L383 (2001). [CrossRef]
  10. P. Dumon, W. Bogaerts, J. Van Campenhout, V. Wiaux, J. Wouters, S. Beckx, R. Baets, �??Low-loss photonic wires and compact ring resonators in silicon-on-insulator,�?? LEOS Benelux Annual Symposium 2003, Netherlands, (2003).
  11. T. Tsuchizawa,T. Watanabe, E. Tamechika, T. Shoji, K. Yamada, J. Takahashi, S. Uchiyama, S. Itabashi and H. Morita, "Fabrication and evaluation of submicron-square Si wire waveguides with spot-size converters", Paper TuU2 presented at LEOS Annual Meeting, p.287, Glasgow, UK (2002).
  12. R. U. Ahmad, F. Pizzuto, G. S. Camarda, R. L. Espinola, H. Rao, and R. M. Osgood, Jr.,�??Ultracompact Corner-Mirrors and T-Branches in Silicon-on-Insulator�??, IEEE Photon. Techn. Lett. 14, 65 (2002). [CrossRef]
  13. V. Almeida, R. Panepucci, and M. Lipson, �??Nanotaper for compact mode conversion,�?? Opt. Lett. 28, 1302 (2002). [CrossRef]
  14. T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, H. Morita, �??Low loss mode size converter from 0.3 ìm square Si wire waveguides to singlemode fibers,�?? Electron. Lett. 38, 1669 (2002). [CrossRef]
  15. P. K. Tien, "Light waves in thin films and integrated optics," Appl. Opt. 10, 2395 (1971). [CrossRef] [PubMed]
  16. D. Marcuse,�??Mode conversion caused by surface imperfections of a dielectric slab waveguide,�?? Bell Syst. Tech. J. 48, 3187 (1969).
  17. F. P. Payne and J. P. R. Lacey, �??A theoretical analysis of scattering loss from planar optical waveguides,�?? Opt. Quantum Electron. 26, 977 (1994). [CrossRef]
  18. E. A. Marcatili, "Bends in optical dielectric guides," Bell Syst. Tech. J. 48, 2103 (1969).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1. Fig. 2. Fig. 3.
Fig. 4.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited