Lithographic fabrication of large curved hologram by laser writer
Optics Express, Vol. 12, Issue 9, pp. 1810-1814 (2004)
http://dx.doi.org/10.1364/OPEX.12.001810
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Abstract
We fabricated a large curved computer-generated hologram pattern on the concave substrate with diameter of 110mm and radius of curvature of 504mm. The line width of the hologram varied form 39um to 810um. We adopt the single pass and the screw-lines to fabricate this curved hologram precisely and efficiently. 80% of the fabrication time is saved by this method. This work will be useful to the measurement of large convex secondary mirrors that is also hardness at present.
© 2004 Optical Society of America
OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.3740) Optical design and fabrication : Lithography
ToC Category:
Research Papers
History
Original Manuscript: March 1, 2004
Revised Manuscript: April 13, 2004
Published: May 3, 2004
Citation
Yongjun Xie, Zhenwu Lu, and Fengyou Li, "Lithographic fabrication of large curved hologram by laser writer," Opt. Express 12, 1810-1814 (2004)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-12-9-1810
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References
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