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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 9 — May. 3, 2004
  • pp: 1908–1915

Arbitrary micropatterning method in femtosecond laser microprocessing using diffractive optical elements

Yutaka Kuroiwa, Nobuhito Takeshima, Yoshihiro Narita, Shuhei Tanaka, and Kazuyuki Hirao  »View Author Affiliations


Optics Express, Vol. 12, Issue 9, pp. 1908-1915 (2004)
http://dx.doi.org/10.1364/OPEX.12.001908


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Abstract

We successfully developed an arbitrary micro-patterning method with femtosecond pulses using a multi-level phase type diffractive optical element (DOE) and a focusing objective lens. The large chromatic dispersion effects of DOE resulting from the spectral bandwidth of femtosecond pulses can be reduced with the appropriate DOE focal length and the proper distance between the DOE and the focusing lens. The method was verified through optical and processing experiments. A partial periodic structure was formed at the designated position. Microstructures were precisely formed on the SiO2 glass surface and inside the glass by irradiating the constructed beam. The points were evenly dispersed with a separation of 5 μm.

© 2004 Optical Society of America

OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(140.3300) Lasers and laser optics : Laser beam shaping
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.2250) Ultrafast optics : Femtosecond phenomena

ToC Category:
Research Papers

History
Original Manuscript: March 2, 2004
Revised Manuscript: April 18, 2004
Published: May 3, 2004

Citation
Yutaka Kuroiwa, Nobuhito Takeshima, Yoshihiro Narita, Shuhei Tanaka, and Kazuyuki Hirao, "Arbitrary micropatterning method in femtosecond laser microprocessing using diffractive optical elements," Opt. Express 12, 1908-1915 (2004)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-12-9-1908


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