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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 1 — Jan. 10, 2005
  • pp: 115–120

Imaging of large-scale integrated circuits using laser terahertz emission microscopy

Masatsugu Yamashita, Kodo Kawase, Chiko Otani, Toshihiko Kiwa, and Masayoshi Tonouchi  »View Author Affiliations

Optics Express, Vol. 13, Issue 1, pp. 115-120 (2005)

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We present the redesign and improved performance of the laser terahertz emission microscope (LTEM), which is a potential tool for locating electrical failures in integrated circuits. The LTEM produces an image of the THz waves emitted when the circuit is irradiated by a femtosecond laser; the amplitude of the THz emission is proportional to the local electric field. By redesigning the optical setup and improving the spatial resolution of the system to below 3 µm, we could extend its application to examining of large-scale integration circuits. As example we show the THz emission pattern of the electric field in an 8-bit microprocessor chip under bias voltage.

© 2005 Optical Society of America

OCIS Codes
(110.0180) Imaging systems : Microscopy
(180.5810) Microscopy : Scanning microscopy
(320.7160) Ultrafast optics : Ultrafast technology

ToC Category:
Research Papers

Original Manuscript: November 8, 2004
Revised Manuscript: December 15, 2004
Manuscript Accepted: December 22, 2004
Published: January 10, 2005

Masatsugu Yamashita, Kodo Kawase, Chiko Otani, Toshihiko Kiwa, and Masayoshi Tonouchi, "Imaging of large-scale integrated circuits using laser terahertz emission microscopy," Opt. Express 13, 115-120 (2005)

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