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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 1 — Jan. 10, 2005
  • pp: 164–170

White-light interference microscopy: effects of multiple reflections within a surface film

Maitreyee Roy, Ian Cooper, Peter Moore, Colin J. R. Sheppard, and Parameswaran Hariharan  »View Author Affiliations


Optics Express, Vol. 13, Issue 1, pp. 164-170 (2005)
http://dx.doi.org/10.1364/OPEX.13.000164


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Abstract

The effects of the presence of a transparent thin film on a test surface in white-light interferometric surface profiling are investigated. An expression is obtained for the output intensity variations in a Michelson interferometer which includes the effect of multiple reflections within the thin film. The number of reflections that need to be considered to obtain good convergence to the correct solution is discussed.

© 2005 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(150.3040) Machine vision : Industrial inspection
(180.3170) Microscopy : Interference microscopy
(180.6900) Microscopy : Three-dimensional microscopy

ToC Category:
Research Papers

History
Original Manuscript: November 17, 2004
Revised Manuscript: December 20, 2004
Manuscript Accepted: December 23, 2004
Published: January 10, 2005

Citation
Maitreyee Roy, Ian Cooper, Peter Moore, Colin J. R. Sheppard, and Parameswaran Hariharan, "White-light interference microscopy: effects of multiple reflections within a surface film," Opt. Express 13, 164-170 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-1-164


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References

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  6. P.  Hariharan, Optical Interferometry (Academic, San Diego, 2003).
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  8. L. J.  Fried, H. A.  Froot, “Thickness measurements of silicon dioxide films over small geometries,” J. Appl. Phys. 39, 5732–5735 (1968). [CrossRef]

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