OSA's Digital Library

Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 12 — Jun. 13, 2005
  • pp: 4651–4656

Evaluation of the quality of Permalloy gratings by diffracted magneto-optical spectroscopy

Roman Antos, Jan Mistrik, Tomuo Yamaguchi, Stefan Visnovsky, Sergej O. Demokritov, and Burkard Hillebrands  »View Author Affiliations

Optics Express, Vol. 13, Issue 12, pp. 4651-4656 (2005)

View Full Text Article

Enhanced HTML    Acrobat PDF (221 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



Magneto-optical Kerr effect (MOKE) spectroscopy in the -1st diffraction order with p-polarized incidence is applied to study arrays of submicron Permalloy wires at polar magnetization. A theoretical approach combining two methods, the local modes method neglecting the edge effects of wires and the rigorous coupled wave analysis, is derived to evaluate the diffraction losses due to irregularities of the wire edges. A new parameter describing the quality of the edges is defined according to their contribution in the diffracted MOKE. The quality factor, evaluated for two different samples, is successfully compared with irregularities visible on atomic force microscopy pictures.

© 2005 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(160.3820) Materials : Magneto-optical materials
(240.5770) Optics at surfaces : Roughness

ToC Category:
Research Papers

Original Manuscript: May 16, 2005
Revised Manuscript: June 3, 2005
Published: June 13, 2005

Roman Antos, Jan Mistrik, Tomuo Yamaguchi, Stefan Visnovsky, Sergej Demokritov, and Burkard Hillebrands, "Evaluation of the quality of Permalloy gratings by diffracted magneto-optical spectroscopy," Opt. Express 13, 4651-4656 (2005)

Sort:  Journal  |  Reset  


  1. H.-T. Huang and F. L. Terry, Jr., �??Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring,�?? Thin Solid Films 455-456, 828-836 (2004). [CrossRef]
  2. R. Antos, I. Ohlidal, J. Mistrik, K. Murakami, T. Yamaguchi, J. Pistora, M. Horie, and S. Visnovsky, �??Spectroscopic ellipsometry on lamellar gratings,�?? Appl. Surf. Sci. 244, 225-229 (2005). [CrossRef]
  3. R. Antos, J. Pistora, I. Ohlidal, K. Postava, J. Mistrik, T. Yamaguchi, S. Visnovsky, and M. Horie, �??Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate,�?? J. Appl. Phys. 97, 053107 (2005). [CrossRef]
  4. P. Klapetek, I. Ohlidal, D. Franta, and P. Pokorny, �??Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method,�?? Surf. Interface Anal. 34, 559-564 (2002). [CrossRef]
  5. P. Klapetek, I. Ohlidal, D. Franta, A. Montaigne-Ramil, A. Bonanni, D. Stifter, and H. Sitter, �??Atomic force microscopy characterization of ZnTe epitaxial films,�?? Acta Phys. Slov. 53, 223-230 (2003).
  6. D. Franta and I. Ohlidal, �??Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,�?? J. Mod. Opt. 45, 903-934 (1998). [CrossRef]
  7. I. Ohlidal and D. Franta, �??Ellipsometry of Thin Film Systems,�?? Progress in Optics 41, 181-282 (2000). [CrossRef]
  8. J. I. Martin, J. Nogues, K. Liu, J. L. Vicent, and I. K. Schuller, �??Ordered magnetic nanostructures: fabrication and properties,�?? J. Magn. Magn. Mater. 256, 449-501 (2003). [CrossRef]
  9. M. Grimsditch and P. Vavassori, �??The diffracted magneto-optic Kerr effect: what does it tell you?�?? J. Phys.:Condens. Matter. 16, R275-R294 (2004). [CrossRef]
  10. Y. Suzuki, C. Chappert, P. Bruno, and P. Veillet, �??Simple model for the magneto-optical Kerr diffraction of a regular array of magnetic dots,�?? J. Magn. Magn. Mater. 165, 516-519 (1997). [CrossRef]
  11. J. L. Costa-Kramer, C. Guerrero, S. Melle, P. Garcia-Mochales, and F. Briones, �??Pure magneto-optic diffraction by a periodic domain structure,�?? Nanotechnology 14, 239-244 (2003). [CrossRef]
  12. D. van Labeke, A. Vial, V. A. Novosad, Y. Souche, M. Schlenker, and A. D. Dos Santos, �??Diffraction of light by a corrugated magnetic grating: experimental results and calculation using a perturbation approximation to the Rayleigh method,�?? Opt. Commun. 124, 519-528 (1996). [CrossRef]
  13. A. Vial and D. Van Labeke, �??Diffraction hysteresis loop modelisation in transverse magneto-optical Kerr effect,�?? Opt. Commun. 153, 125-133 (1998). [CrossRef]
  14. Y. Pagani, D. Van Labeke, B. Guizal, A. Vial, and F. Baida, �??Diffraction hysteresis loop modeling in magneto-optical gratings,�?? Opt. Commun. 209, 237-244 (2002). [CrossRef]
  15. Y. Souche, V. Novosad, B. Pannetier, and O. Geoffroy, �??Magneto-optical diffraction and transverse Kerr effect,�?? J. Magn. Magn. Mater. 177-181, 1277-1278 (1998). [CrossRef]
  16. P. Garcia-Mochales, J. L. Costa-Kramer, G. Armelles, F. Briones, D. Jaque, J. I. Martin, and J. L. Vicent, �??Simulations and experiments on magneto-optical diffraction by an array of epitaxial Fe(001) microsquares,�?? Appl. Phys. Lett. 81, 3206-3208 (2002). [CrossRef]
  17. R. Antos, J. Mistrik, M. Aoyama, T. Yamaguchi, S. Visnovsky, and B. Hillebrands, �??Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders,�?? J. Magn. Magn. Mater. 272-276, 1670-1671 (2004). [CrossRef]
  18. R. Antos, J. Mistrik, S. Visnovsky, M. Aoyama, T. Yamaguchi, and B. Hillebrands, �??Characterization of Permalloy wires by optical and magneto-optical spectroscopy,�?? Trans. Magn. Soc. Japan 4, 282-285 (2004). [CrossRef]
  19. R. Antos, J. Mistrik, T. Yamaguchi, S. Visnovsky, S.O. Demokritov, and B. Hillebrands, �??Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth- and first-diffraction orders,�?? Appl. Phys. Lett. 86, 231101 (2005). [CrossRef]
  20. S. Ingvarsson, �??Magnetization dynamics in transition metal ferromagnets studied by magneto-tunneling and ferromagnetic resonance,�?? (Ph.D. thesis, Brown University, 2001).
  21. K. Rokushima and J. Yamakita, �??Analysis of anisotropic dielectric gratings,�?? J. Opt. Soc. Am. 73, 901-908 (1983). [CrossRef]
  22. G. Neuber, R. Rauer, J. Kunze, T. Korn, C. Pels, G. Meier, U. Merkt, J. Backstrom, and M. Rubhausen, �??Temperature-dependent spectral generalized magneto-optical ellipsometry,�?? Appl. Phys. Lett. 83, 4509-4511 (2003). [CrossRef]
  23. P. Hones, M. Diserens, and F. Levy, �??Characterization of sputter-deposited chromium oxide thin films,�?? Surf. Coat. Tech. 120-121, 277-283 (1999). [CrossRef]
  24. D. F. Edwards, �??Silicon (Si),�?? in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, Tokyo, 1998); H. R. Philipp, �??Silicon Dioxide (SiO2) (Glass),�?? ibid.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1. Fig. 2. Fig. 3.
Fig. 4.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited