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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 13 — Jun. 27, 2005
  • pp: 4854–4861

Improvement of the optical coating process by cutting layers with sensitive monitor wavelengths

Cheng-Chung Lee, Kai Wu, Chien-Cheng Kuo, and Sheng-Hui Chen  »View Author Affiliations


Optics Express, Vol. 13, Issue 13, pp. 4854-4861 (2005)
http://dx.doi.org/10.1364/OPEX.13.004854


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Abstract

For costly optical coatings, a precise monitoring method is necessary. A new monitoring method based on the selection of the most sensitive monitor wavelength is proposed. The most sensitive monitor wavelength is easy to find by a numerical analysis. The equation for the thickness compensation when a layer is over-shot or under-shot was derived. Several examples, including narrow-band pass filters, have been given to demonstrate that this new method is superior to the turning point method in the coating process.

© 2005 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Research Papers

History
Original Manuscript: April 26, 2005
Revised Manuscript: May 20, 2005
Published: June 27, 2005

Citation
Cheng-Chung Lee, Kai Wu, Chien-Cheng Kuo, and Sheng-Hui Chen, "Improvement of the optical coating process by cutting layers with sensitive monitoring wavelengths," Opt. Express 13, 4854-4861 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-13-4854


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References

  1. H. A. Macleod, �??Monitoring of optical coatings,�?? Appl. Opt. 20, 82-89 (1981) [CrossRef] [PubMed]
  2. Cheng Zang, Yongtain Wang, and Weiqiang Lu, �??A single-wavelength monitoring method for optical thin-film coatings,�?? Opt. Eng. 43, 1439-1443 (2004). [CrossRef]
  3. B. Vidal, A. Fornier and E Pelletier, �??Wideband optical monitoring of nonquarter wave multilayer filter�??, Appl. Opt. 18, 3851-3856 (1979). [PubMed]
  4. H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (IoP, Bristal, 2001). [CrossRef]
  5. Y. R. Chen, Monitoring of film growth by admittance diagram, Master Thesis of the National Central University, Taiwan (2004).
  6. H. A. Macleod and E Pelletier, �??Error compensation mechanisms in some thin film monitoring systems,�?? Opt. Acta 24, 907-930 (1977) [CrossRef]
  7. H. A. Macleod, �??Turning value monitoring of narrow-band all-dielectric thin-film optical filters,�?? Opt. Acta, 19, 1-28 (1972). [CrossRef]

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