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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 13 — Jun. 27, 2005
  • pp: 4854–4861

Improvement of the optical coating process by cutting layers with sensitive monitor wavelengths

Cheng-Chung Lee, Kai Wu, Chien-Cheng Kuo, and Sheng-Hui Chen  »View Author Affiliations

Optics Express, Vol. 13, Issue 13, pp. 4854-4861 (2005)

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For costly optical coatings, a precise monitoring method is necessary. A new monitoring method based on the selection of the most sensitive monitor wavelength is proposed. The most sensitive monitor wavelength is easy to find by a numerical analysis. The equation for the thickness compensation when a layer is over-shot or under-shot was derived. Several examples, including narrow-band pass filters, have been given to demonstrate that this new method is superior to the turning point method in the coating process.

© 2005 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Research Papers

Original Manuscript: April 26, 2005
Revised Manuscript: May 20, 2005
Published: June 27, 2005

Cheng-Chung Lee, Kai Wu, Chien-Cheng Kuo, and Sheng-Hui Chen, "Improvement of the optical coating process by cutting layers with sensitive monitoring wavelengths," Opt. Express 13, 4854-4861 (2005)

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