Formation of c-axis oriented ZnO optical waveguides by radio-frequency magnetron sputtering
Optics Express, Vol. 13, Issue 13, pp. 5093-5099 (2005)
http://dx.doi.org/10.1364/OPEX.13.005093
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Abstract
ZnO/Mg0.16Zn0.84O (ZnO/MgZnO) films are fabricated on x-cut and z-cut LiNbO3 (LN) substrates by radio-frequency magnetron sputtering. High transparencies are confirmed by a spectrophotometer. X-ray diffraction (XRD) spectra show that all the films are c-axis oriented. The waveguiding properties, as well as the refractive indices and thickness of the films are demonstrated and determined by prism coupling. Both transverse electric (TE) and transverse magnetic (TM) modes are measured at λ=0.633 µm and 1.539 µm, respectively. The waveguide loss is measured at λ=0.633 µm with a fiber probe technique. The experimental results show that high optical quality ZnO films can be obtained with MgZnO buffer layers.
© 2005 Optical Society of America
OCIS Codes
(160.4670) Materials : Optical materials
(310.6860) Thin films : Thin films, optical properties
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
ToC Category:
Research Papers
History
Original Manuscript: April 22, 2005
Revised Manuscript: June 18, 2005
Published: June 27, 2005
Citation
Chuan-Lei Jia, Ke-Ming Wang, Xue-Lin Wang, Xi-Jian Zhang, and Fei Lu, "Formation of c-axis oriented ZnO optical waveguides by radio-frequency magnetron sputtering," Opt. Express 13, 5093-5099 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-13-5093
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