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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 17 — Aug. 22, 2005
  • pp: 6635–6644

Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica.

Yves Bellouard, Ali A. Said, and Philippe Bado  »View Author Affiliations

Optics Express, Vol. 13, Issue 17, pp. 6635-6644 (2005)

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We present a novel optical sensor concept that merges integrated optics and micro-mechanics in a monolithic substrate. This concept pushes microsystems integration and defines a new class of monolithic optical microsystems where only optical signals are processed. As an illustration, we present a high-precision, monolithic, glass-based, micro-displacement sensor. Our displacement sensor is made out of a single piece of glass through a two-step process based on femtosecond laser illumination followed by chemical etching.

© 2005 Optical Society of America

OCIS Codes
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(130.3120) Integrated optics : Integrated optics devices
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4880) Optical design and fabrication : Optomechanics
(230.1150) Optical devices : All-optical devices
(230.7370) Optical devices : Waveguides
(320.7130) Ultrafast optics : Ultrafast processes in condensed matter, including semiconductors

ToC Category:
Research Papers

Original Manuscript: June 1, 2005
Revised Manuscript: August 16, 2005
Published: August 22, 2005

Yves Bellouard, Ali Said, and Philippe Bado, "Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica," Opt. Express 13, 6635-6644 (2005)

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  1. Y. Bellouard, PhD dissertation (no 2308), Ecole Polytechnique Fédérale de Lausanne, 2000.
  2. K. M. Davis, K. Miura, N. Sugimoto, K. Hirao, �??Writing waveguides in glass with a femtosecond laser,�?? Opt. Lett. 21, 1729-1731 (1996). [CrossRef] [PubMed]
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  5. Y. Bellouard, A. Said, M. Dugan, P. Bado, �??Fabrication of High-Aspect Ratio, Micro-Fluidic Channels and Tunnels using Femtosecond Laser Pulses and Chemical Etching,�?? Opt. Express 12, 2120-2129 (2004), <a href= "http://www.opticsexpress.org/abstract.cfm?URI=OPEX-12-10-2120">http://www.opticsexpress.org/abstract.cfm?URI=OPEX-12-10-2120</a>. [CrossRef] [PubMed]
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