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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 17 — Aug. 22, 2005
  • pp: 6635–6644

Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica.

Yves Bellouard, Ali A. Said, and Philippe Bado  »View Author Affiliations


Optics Express, Vol. 13, Issue 17, pp. 6635-6644 (2005)
http://dx.doi.org/10.1364/OPEX.13.006635


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Abstract

We present a novel optical sensor concept that merges integrated optics and micro-mechanics in a monolithic substrate. This concept pushes microsystems integration and defines a new class of monolithic optical microsystems where only optical signals are processed. As an illustration, we present a high-precision, monolithic, glass-based, micro-displacement sensor. Our displacement sensor is made out of a single piece of glass through a two-step process based on femtosecond laser illumination followed by chemical etching.

© 2005 Optical Society of America

OCIS Codes
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(130.3120) Integrated optics : Integrated optics devices
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4880) Optical design and fabrication : Optomechanics
(230.1150) Optical devices : All-optical devices
(230.7370) Optical devices : Waveguides
(320.7130) Ultrafast optics : Ultrafast processes in condensed matter, including semiconductors

ToC Category:
Research Papers

History
Original Manuscript: June 1, 2005
Revised Manuscript: August 16, 2005
Published: August 22, 2005

Citation
Yves Bellouard, Ali Said, and Philippe Bado, "Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica," Opt. Express 13, 6635-6644 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-17-6635


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References

  1. Y. Bellouard, PhD dissertation (no 2308), Ecole Polytechnique Fédérale de Lausanne, 2000.
  2. K. M. Davis, K. Miura, N. Sugimoto, K. Hirao, �??Writing waveguides in glass with a femtosecond laser,�?? Opt. Lett. 21, 1729-1731 (1996). [CrossRef] [PubMed]
  3. A. Marcinkevi�?ius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, J. Nishii, �??Femtosecond laser-assisted three-dimensional microfabrication in silica,�?? Opt. Lett. 26, 277-279 (2001). [CrossRef]
  4. P. Bado, A. A. Said, M. Dugan, T. Sosnowski, S. Wright, �??Dramatic Improvements in Waveguide Manufacturing with Femtosecond Lasers�?? in NFOEC, Dallas (TX), Sept. 2002.
  5. Y. Bellouard, A. Said, M. Dugan, P. Bado, �??Fabrication of High-Aspect Ratio, Micro-Fluidic Channels and Tunnels using Femtosecond Laser Pulses and Chemical Etching,�?? Opt. Express 12, 2120-2129 (2004), <a href= "http://www.opticsexpress.org/abstract.cfm?URI=OPEX-12-10-2120">http://www.opticsexpress.org/abstract.cfm?URI=OPEX-12-10-2120</a>. [CrossRef] [PubMed]
  6. P. Bado, A. Said, M. Dugan, �??Manufacturing of high quality integrated optical components by laser direct-write,�?? in ICALEO, Jacksonville (FL), Oct. 2003.
  7. S. Ungar, Fiber Optics, Theory and Applications, (John Wiley & Sons, NY, ISBN 0 417 92758 9, 1990).
  8. R.V. Jones, Parallel and rectilinear spring movements, J. Sci. Instrum. 28, 38-41 (1951). [CrossRef]
  9. S. T. Smith, D.G. Chetwynd, Foundations of Ultraprecision Mechanism Design, ed. Gordon & Breach Publishers.
  10. J.M. Paros, L. Weisborg, Machine Design 27, 151-156 (1965).
  11. S. Henein, �??Conception des guidages flexibles,�?? Press Polytechniques et Universitaires Romandes, 2001.
  12. H. Scholze, Glass: Nature, Structure and Properties, (Springer-Verlag publishers, 1990).

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