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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 18 — Sep. 5, 2005
  • pp: 7225–7232

Freestanding optical fibers fabricated in a glass chip using femtosecond laser micromachining for lab-on-a-chip application

Ya Cheng, Koji Sugioka, and Katsumi Midorikawa  »View Author Affiliations


Optics Express, Vol. 13, Issue 18, pp. 7225-7232 (2005)
http://dx.doi.org/10.1364/OPEX.13.007225


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Abstract

We describe the fabrication of freestanding optical fibers in a glass chip by femtosecond laser three-dimensional (3D) micro-machining. The process has mainly four steps: (1) femtosecond laser scanning of the areas surrounding the fibers; (2) postan-nealing of the sample for the modification of the exposed areas; (3) chemical etching of the sample for the selective removal of the modified areas; and (4) second postannealing for smoothening the surfaces of the fibers. The measured optical loss of the fibers is approximately 0.7dB/cm. Integrating the freestanding fibers with 3D micromirrors is also demonstrated, enabling functions such as light folding or splitting in the glass chips. Furthermore, we demonstrate that the freestanding fibers can be incorporated into a microfluidic circuit for on-chip biophotonic applications.

© 2005 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.7090) Lasers and laser optics : Ultrafast lasers

ToC Category:
Research Papers

History
Original Manuscript: July 5, 2005
Revised Manuscript: August 25, 2005
Published: September 5, 2005

Citation
Ya Cheng, Koji Sugioka, and Katsumi Midorikawa, "Freestanding optical fibers fabricated in a glass chip using femtosecond laser micromachining for lab-on-a-chip application," Opt. Express 13, 7225-7232 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-18-7225


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References

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