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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 19 — Sep. 19, 2005
  • pp: 7615–7620

Chiral microstructures (spirals) fabrication by holographic lithography

Yee Kwong Pang, Jeffrey Chi Wai Lee, Hung Fai Lee, Wing Yim Tam, C. T. Chan, and Ping Sheng  »View Author Affiliations

Optics Express, Vol. 13, Issue 19, pp. 7615-7620 (2005)

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We present an optical interference model to create chiral microstructures (spirals) and its realization in photoresist using holographic lithography. The model is based on the interference of six equally-spaced circumpolar linear polarized side beams and a circular polarized central beam. The pitch and separation of the spirals can be varied by changing the angle between the side beams and the central beam. The realization of the model is carried out using the 325 nm line of a He-Cd laser and spirals of sub-micron size are fabricated in photoresist.

© 2005 Optical Society of America

OCIS Codes
(090.4220) Holography : Multiplex holography
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Research Papers

Original Manuscript: August 3, 2005
Revised Manuscript: September 11, 2005
Published: September 19, 2005

Yee Kwong Pang, Jeffrey Lee, Hung Lee, Wing Yim Tam, C. Chan, and Ping Sheng, "Chiral microstructures (spirals) fabrication by holographic lithography," Opt. Express 13, 7615-7620 (2005)

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Fig. 1. Fig. 2. Fig.3.

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