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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 21 — Oct. 17, 2005
  • pp: 8618–8624

Diffraction grating couplers milled in Si3N4 rib waveguides with a focused ion beam

Kirill E. Zinoviev, Carlos Dominguez, and Anna Vilà  »View Author Affiliations

Optics Express, Vol. 13, Issue 21, pp. 8618-8624 (2005)

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Focused ion beam milling is a processing technology which allows flexible direct writing of nanometer scale features efficiently substituting electron beam lithography. No mask need results in ability for patterns writing even on fragile micromechanical devices. In this work we studied the abilities of the tool for fabrication of diffraction grating couplers in silicon nitride waveguides. The gratings were fabricated on a chip with extra fragile cantilevers of sub micron thickness. Optical characterization of the couplers was done using excitation of the waveguides in visible range by focused Gaussian beams of different waist sizes. Influence of Ga+ implantation on the device performance was studied.

© 2005 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(130.2790) Integrated optics : Guided waves
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Research Papers

Original Manuscript: September 6, 2005
Revised Manuscript: October 10, 2005
Published: October 17, 2005

Kirill Zinoviev, Carlos Dominguez, and Anna Vilà, "Diffraction grating couplers milled in Si3N4 rib waveguides with a focused ion beam," Opt. Express 13, 8618-8624 (2005)

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