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Optics Express

Optics Express

  • Editor: Micha
  • Vol. 13, Iss. 23 — Nov. 14, 2005
  • pp: 9605–9611

Fabrication of two- and three-dimensional periodic structures by multi-exposure of two-beam interference technique

Ngoc Diep Lai, Wen Ping Liang, Jian Hung Lin, Chia Chen Hsu, and Cheng Hsiung Lin  »View Author Affiliations


Optics Express, Vol. 13, Issue 23, pp. 9605-9611 (2005)
http://dx.doi.org/10.1364/OPEX.13.009605


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Abstract

A simple and efficient optical interference method for fabricating high quality two- and three-dimensional (2D and 3D) periodic structures is demonstrated. Employing multi-exposure of two-beam interference technique, different types of periodic structures are created depending on the number of exposure and the rotation angle of the sample for each exposure. Square and hexagonal 2D structures are fabricated by a multi-exposure of two-beam interference pattern with a rotation angle of 90° and 60° between two different exposures, respectively. Three-exposure, in particular, results in different kinds of 3D structures, with close lattice constants in transverse and longitudinal directions, which is difficult to be obtained by the commonly used multi-beam interference technique. The experimental results obtained with SU-8 photoresist are well in agreement with the theoretical predictions. Multi-exposure of two-beam interference technique should be very useful for fabrication of photonic crystals.

© 2005 Optical Society of America

OCIS Codes
(090.0090) Holography : Holography
(110.5220) Imaging systems : Photolithography
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(260.3160) Physical optics : Interference

ToC Category:
Research Papers

History
Original Manuscript: October 7, 2005
Revised Manuscript: November 7, 2005
Published: November 14, 2005

Citation
Ngoc Diep Lai, Wen Ping Liang, Jian Hung Lin, Chia Chen Hsu, and Cheng Hsiung Lin, "Fabrication of two- and three-dimensional periodic structures by multi-exposure of two-beam interference technique," Opt. Express 13, 9605-9611 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-23-9605


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