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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 25 — Dec. 12, 2005
  • pp: 10066–10074

Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film

Hisashi Akiyama, Osami Sasaki, and Takamasa Suzuki  »View Author Affiliations


Optics Express, Vol. 13, Issue 25, pp. 10066-10074 (2005)
http://dx.doi.org/10.1364/OPEX.13.010066


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Abstract

A sinusoidal wavelength-scanning interferometer for measuring thickness and surfaces profiles of a thin film has been proposed in which a superluminescent laser diode and an acousto-optic tunable filter are used. The interference signal contains an amplitude Zb of a time-varying phase and a constant phase α. Two values of an optical path difference (OPD) obtained from Zb and α, respectively, are combined to measure an OPD longer than a wavelength. The values of Zb and α are estimated by minimizing the difference between the detected signals and theoretical ones. From the estimated values, thickness and surface of a silicon dioxide film coated on an IC wafer with different thicknesses of 1 μm and 4 μm are measured with an error less than 5 nm.

© 2005 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(240.0310) Optics at surfaces : Thin films

ToC Category:
Research Papers

Citation
Hisashi Akiyama, Osami Sasaki, and Takamasa Suzuki, "Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film," Opt. Express 13, 10066-10074 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-25-10066


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References

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