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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 25 — Dec. 12, 2005
  • pp: 10066–10074

Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film

Hisashi Akiyama, Osami Sasaki, and Takamasa Suzuki  »View Author Affiliations

Optics Express, Vol. 13, Issue 25, pp. 10066-10074 (2005)

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A sinusoidal wavelength-scanning interferometer for measuring thickness and surfaces profiles of a thin film has been proposed in which a superluminescent laser diode and an acousto-optic tunable filter are used. The interference signal contains an amplitude Zb of a time-varying phase and a constant phase α. Two values of an optical path difference (OPD) obtained from Zb and α, respectively, are combined to measure an OPD longer than a wavelength. The values of Zb and α are estimated by minimizing the difference between the detected signals and theoretical ones. From the estimated values, thickness and surface of a silicon dioxide film coated on an IC wafer with different thicknesses of 1 μm and 4 μm are measured with an error less than 5 nm.

© 2005 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(240.0310) Optics at surfaces : Thin films

ToC Category:
Research Papers

Hisashi Akiyama, Osami Sasaki, and Takamasa Suzuki, "Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film," Opt. Express 13, 10066-10074 (2005)

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  1. H. Maruyama, S. Inoue, T. Mitsuyama, M. Ohmi, and M. Haruna, "Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness," Appl. Opt. 41, 1315-1322 (2002). [CrossRef] [PubMed]
  2. T. Funaba, N. Tanno and H. Ito, "Multimode-laser reflectometer with a multichannel wavelength detector and its application," Appl. Opt. 36, 8919-8928 (1997). [CrossRef]
  3. S. W. Kim and G. H. Kim, "Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry," Appl. Opt. 38, 5968-5973 (1999). [CrossRef]
  4. D. Kim, S. Kim, H. J. Kong and Y. Lee, "Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter," Opt. Lett. 27, 1893-1895 (2002). [CrossRef]
  5. D. Kim and S. Kim, "Direct spectral phase function calculation for dispersive interferometric thickness profilometry," Opt. Express 12, 5117-5124 (2004) <a href="http://www.opticsexpress.org/abstract.cfm?URI=OPEX-12-21-5117">http://www.opticsexpress.org/abstract.cfm?URI=OPEX-12-21-5117</a>. [CrossRef] [PubMed]
  6. O. Sasaki, K. Tsuji, S. Sato, T. Kuwahara and T. Suzuki, "Sinusoidal wavelength-scanning interferometers," in Laser Interferometry IX: techniques and Analysis, M. Kujawinska, G. M. Brown, and M. Takeda, eds., Proc. SPIE 3478, 37-44 (1998). [CrossRef]
  7. O. Sasaki, N. Murata, and T. Suzuki, "Sinusoidal wavelength-scanning interferometer with a superluminescent diode for step-profile measurement," Appl. Opt. 39, 4589-4592 (2000). [CrossRef]
  8. O. Sasaki, Y. Shimakura, and T. Suzuki, "Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement," in Advanced Materials and Devices for Sensing and Imaging, J. Yao and Y. Ishii, eds., Proc. SPIE 4919, 220-226 (2002).
  9. O. Sasaki, T. Yoshida and T. Suzuki, "Double sinusoidal phase-modulating laser diode interferometer for distance measurement," Appl. Opt. 30, 3617-3621 (1991). [CrossRef] [PubMed]
  10. H. Akiyama, O. Sasaki and T. Suzuki, "Thickness and surface profile measurement by a sinusoidal wavelength-scanning interferometer," Opt. Rev. 12, 319-323 (2005). [CrossRef]

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