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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 25 — Dec. 12, 2005
  • pp: 10292–10301

High-extinction-ratio micro polarizing beam splitter for short wavelength optical storage applications

Chi-Hung Lee, Yi Chiu, and Han-Ping D. Shieh  »View Author Affiliations

Optics Express, Vol. 13, Issue 25, pp. 10292-10301 (2005)

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A surface-micromachined high-extinction-ratio polarizing beam splitter (PBS) using low absorptive silicon nitride layers for blue wavelength applications are demonstrated. The micro polarizing beam splitter consists of novel stack of two silicon nitride layers separated by an air gap. A PBS optimization model is established to achieve both high extinction-ratio and adequate process margin. The polarization extinction ratios of 25 dB for the reflected light and 15 dB for the transmitted light were experimentally achieved at λ=405 nm. The fabrication of the PBS is compatible with other micro diffractive elements to build a micro optical bench, thus, feasible for short wavelength optical storage applications.

© 2005 Optical Society of America

OCIS Codes
(210.0210) Optical data storage : Optical data storage
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.5440) Optical devices : Polarization-selective devices
(310.6860) Thin films : Thin films, optical properties
(350.3950) Other areas of optics : Micro-optics

ToC Category:
Research Papers

Chi-Hung Lee, Yi Chiu, and Han-Ping D. Shieh, "High-extinction-ratio micro polarizing beam splitter for short wavelength optical storage applications," Opt. Express 13, 10292-10301 (2005)

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