High-extinction-ratio micro polarizing beam splitter for short wavelength optical storage applications
Optics Express, Vol. 13, Issue 25, pp. 10292-10301 (2005)
http://dx.doi.org/10.1364/OPEX.13.010292
Enhanced HTML 
Acrobat PDF (525 KB)
Abstract
A surface-micromachined high-extinction-ratio polarizing beam splitter (PBS) using low absorptive silicon nitride layers for blue wavelength applications are demonstrated. The micro polarizing beam splitter consists of novel stack of two silicon nitride layers separated by an air gap. A PBS optimization model is established to achieve both high extinction-ratio and adequate process margin. The polarization extinction ratios of 25 dB for the reflected light and 15 dB for the transmitted light were experimentally achieved at λ=405 nm. The fabrication of the PBS is compatible with other micro diffractive elements to build a micro optical bench, thus, feasible for short wavelength optical storage applications.
© 2005 Optical Society of America
OCIS Codes
(210.0210) Optical data storage : Optical data storage
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.5440) Optical devices : Polarization-selective devices
(310.6860) Thin films : Thin films, optical properties
(350.3950) Other areas of optics : Micro-optics
ToC Category:
Research Papers
Citation
Chi-Hung Lee, Yi Chiu, and Han-Ping D. Shieh, "High-extinction-ratio micro polarizing beam splitter for short wavelength optical storage applications," Opt. Express 13, 10292-10301 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-25-10292
Sort: Journal | Reset
References
- C. Pu, Z. Zhu, and Y. H. Lo, "Surface micromachined integrated optical polarization beam splitter," IEEE Photon. Technol. Lett. 10, 988-990 (1998). [CrossRef]
- K. K. Schuegraf, ed., Thin Film Deposition Process and Techniques (Noyes Publications, Park Ridge, NJ 1988).
- S. Wolf and R. Tauber, Silicon Processing for the VLSI Era, Vol. 1: Process Technology (Lattice, Sunset Beach, CA, 1986).
- M. Sekimoto, H. Yoshihara, and T. Ohkubo, "Silicon nitride single-layer x-ray mask," J. Vac. Sci. Technol. 21, 1017-1021 (1982). [CrossRef]
- J. G. E. Gardeniers, H. A. C. Tilmans and C. C. G. Visser, "LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design," J. Vac. Sci. Technol. A 14, 2879-2892 (1996). [CrossRef]
- D. Maier-Schneider, A. Ersoy, J. Maibach, D. Schneider, and E. Obermeier, "Influence of annealing on elastic properties of LPCVD silicon nitride and LPCVD polysilicon," Sens. Materials 7, 121-129 (1995).
- M. Born and E. Wolf, Principles of Optics (University Press, Cambridge, 1999), Chap. 1.
Cited By |
 Alert me when this paper is cited |
OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.
Related Journal Articles 
- Semitransparent metal or distributed Bragg reflector for wide-viewing-angle organic light-emitting-diode microcavities (JOSAB)
- Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses (OL)
- Polarization recording and reconstruction in Disperse Red 1 -doped cellulose acetate (OL)
- Micro actuated grating for multi-beam optical pickups (OE)
- Smallest lithographic marks generated by optical focusing systems (OL)
Related Conference Papers
- A new optical disk head structure of near-field evanescent wave with writable high power density to a terabyte disk surface using VCSEL
- Micro-optical modules fabricated by high-precision replication processes
- Blu-ray Disc/DVD/CD Compatible Pick-up having a Single Objective Lens and SA detection Function
- Micro-fabrication grinding of aspheric micro-lens mold with ELID (Electrolytic In-Process Dressing)
- High efficient optical manipulation of microparticles using micro-optical elements
« Previous Article | Next Article »
OSA is a member of 