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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 3 — Feb. 7, 2005
  • pp: 695–701

Profilometry with line-field Fourier-domain interferometry

Takashi Endo, Yoshiaki Yasuno, Shuichi Makita, Masahide Itoh, and Toyohiko Yatagai  »View Author Affiliations


Optics Express, Vol. 13, Issue 3, pp. 695-701 (2005)
http://dx.doi.org/10.1364/OPEX.13.000695


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Abstract

Line-field Fourier-domain interferometry that is capable of a fast three-dimensional (3-D) shape measurement is proposed. This system is constructed from a combination of a conventional Fourier-domain interferometer and a one-dimensional imaging system. This system directs a line-shaped focus onto a specimen, and a two-dimensional shape can be calculated from a single-shot image of the CCD camera without any mechanical scan. An aspherical mirror and a Japanese coin are presented as a 3-D shape measurement example.

© 2005 Optical Society of America

OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(180.6900) Microscopy : Three-dimensional microscopy

ToC Category:
Research Papers

History
Original Manuscript: November 24, 2004
Revised Manuscript: January 14, 2005
Published: February 7, 2005

Citation
Takashi Endo, Yoshiaki Yasuno, Shuichi Makita, Masahide Itoh, and Toyohiko Yatagai, "Profilometry with line-field Fourier-domain interferometry," Opt. Express 13, 695-701 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-3-695


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