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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 5 — Mar. 7, 2005
  • pp: 1537–1543

Self-mixing interferometer based on sinusoidal phase modulating technique

Dongmei Guo, Ming Wang, and Suqing Tan  »View Author Affiliations

Optics Express, Vol. 13, Issue 5, pp. 1537-1543 (2005)

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A new self-mixing interferometry based on sinusoidal phase modulating technique is presented. Self-mixing interference occurs in the laser cavity by reflecting the light from a mirror-like target in front of the laser. Sinusoidal phase modulation of the beam is obtained by an electro-optic modulator (EOM) in the external cavity. The phase of the interference signal is calculated by Fourier analysis method. The interferometer is applied to measure the displacement of a high-precision commercial PZT with an accuracy of <10nm. The measurement range of the system mainly depends on the maximum operating frequency of EOM and the maximum sampling rate of A/D converter.

© 2005 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation

ToC Category:
Research Papers

Original Manuscript: January 19, 2005
Revised Manuscript: February 22, 2005
Published: March 7, 2005

Dongmei Guo, Ming Wang, and Suqing Tan, "Self-mixing interferometer based on sinusoidal phase modulating technique," Opt. Express 13, 1537-1543 (2005)

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