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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 7 — Apr. 4, 2005
  • pp: 2403–2418

Angle-resolved ellipsometry of scattering patterns from arbitrary surfaces and bulks

Olivier Gilbert, Carole Deumié, and Claude Amra  »View Author Affiliations


Optics Express, Vol. 13, Issue 7, pp. 2403-2418 (2005)
http://dx.doi.org/10.1364/OPEX.13.002403


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Abstract

Accurate angular phase data are extracted from angle-resolved scattering measurements made with polarized light using a technique developed in the laboratory. This Ellipsometry of Angle-Resolved Scattering (E.A.R.S.) technique makes it possible to distinguish surface scattering from bulk scattering independent of the scattering levels for different types of samples. Phase data are also investigated in the speckle pattern.

© 2005 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(240.0240) Optics at surfaces : Optics at surfaces
(240.5770) Optics at surfaces : Roughness

ToC Category:
Research Papers

History
Original Manuscript: December 16, 2004
Revised Manuscript: March 16, 2005
Published: April 4, 2005

Citation
Olivier Gilbert, Carole Deumié, and Claude Amra, "Angle-resolved ellipsometry of scattering patterns from arbitrary surfaces and bulks," Opt. Express 13, 2403-2418 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-7-2403


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