OSA's Digital Library

Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 8 — Apr. 18, 2005
  • pp: 3104–3109

Optical transfer of periodic microstructures by interfering femtosecond laser beams

Quan-Zhong Zhao, Jian-Rong Qiu, Chong-Jun Zhao, Xiong-Wei Jiang, and Cong-Shan Zhu  »View Author Affiliations

Optics Express, Vol. 13, Issue 8, pp. 3104-3109 (2005)

View Full Text Article

Enhanced HTML    Acrobat PDF (324 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We report on an optical interference method for transferring periodic microstructures of metal film from a supporting substrate to a receiving substrate by means of five-beam interference of femtosecond laser pulses. Scanning electron microscopy and optical microscopy revealed microstructures with micrometer-order were transferred to the receiving substrate. In the meanwhile, a negative copy of the transferred structures was induced in the metal film on the supporting substrate. The diffraction characteristics of the transferred structures were also evaluated. The present technique allows one-step realization of functional optoelectronic devices.

© 2005 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4000) Optical design and fabrication : Microstructure fabrication
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Research Papers

Original Manuscript: February 23, 2005
Revised Manuscript: March 23, 2005
Published: April 18, 2005

Quan-Zhong Zhao, Jian-Rong Qiu, Chong-Jun Zhao, Xiong-Wei Jiang, and Cong-Shan Zhu, "Optical transfer of periodic microstructures by interfering femtosecond laser beams," Opt. Express 13, 3104-3109 (2005)

Sort:  Journal  |  Reset  


  1. K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, H. Hosono, �??Fabrication of surface relief gratings on transparent dielectric materials by two-beam holographic method using infrared femtosecond laser pulses,�?? Appl. Phys. B 71, 119-21 (2000) [CrossRef]
  2. J. Si, J. Qiu, J. Zhai, Y. Shen, K. Hirao, �??Photoinduced permanent gratings inside bulk azodye-doped polymers by the coherent field of a femtosecond laser,�?? Appl. Phys. Lett. 80, 359-61 (2002). [CrossRef]
  3. G. Qian, J. Guo, M. Wang, J. Si, J. Qiu, and K. Hirao, �??Holographic volume gratings in bulk perylene-orange-doped hybrid inorganic-organic materials by the coherent field of a femtosecond laser,�?? Appl. Phys. Lett. 83, 2327-9 (2003). [CrossRef]
  4. Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, Y. Jiang, �??Holographic fabrication of multiple layers of grating inside soda�??lime glass with femtosecond laser pulses,�?? Appl. Phys. Lett. 80, 1508-10 (2002). [CrossRef]
  5. T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, �??Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals,�?? Appl. Phys. Lett. 79, 725-7 (2001). [CrossRef]
  6. T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, H. Misawa, �??Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,�?? Appl. Phys. Lett. 82, 2758-60 (2003). [CrossRef]
  7. Y. Nakata, T. Okada, and M. Maeda, �??Fabrication of dot matrix, comb, and nanowire structures using laser ablation by interfered femtosecond laser beams,�?? Appl. Phys. Lett. 81, 4239-41 (2002); Y. Nakata, T. Okada, M. Maeda, �??Nano-sized hollow bump array generated by single femtosecond laser pulse,�?? Jpn. J. Appl. Phys. 42, L 1452-4 (2003). [CrossRef]
  8. K. Kawamura, N. Ito, N. Sarukura, M. Hirano, H. Hosono, �??New adjustment technique for time coincidence of femtosecond laser pulses using third harmonic generation in air and its application to holograph encoding system,�?? Rev. of Sci. Instrum. 73, 1711-4 (2002). [CrossRef]
  9. A. A. Maznev, T. F. Crimmins, and K. A. Nelson, �??How to make femtosecond pulses overlap,�?? Opt. Lett. 23, 1378-80 (1998). [CrossRef]
  10. S. Mailis, I. Zergioti, G. Koundourakis, A. Ikiades, A. Patentalaki, P. Papakonstantinou, N. A. Vainos, C. Fotakis, �??Etching and printing of diffractive optical microstructures by a femtosecong excimer laser,�?? Appl. Opt. 38, 2301-8 (1999). [CrossRef]
  11. I. Zergioti, S. Mailis, N. A. Vainos, P. Papakonstantinou, C. Kalpouzos, C. P. Grigoropoulos, C. Fotakis, �??Microdeposition of metal and oxide structures using ultashort laser pulses,�?? Appl. Phys. A 66, 579-82 (1998). [CrossRef]
  12. D. B. Chrisey, A. Pique, J. Fitz-Gerald, R. C. Y. Auyeung, R. A. McGill, H. D. Wu, M. Duignan, �??New approach to laser direct writing active and passive mesoscopic circuit elements,�?? Appl. Surf. Sci. 154-155, 593-600 (2000). [CrossRef]
  13. R. Bähnisch, W. Gro�?, A. Menschig, �??Single shot, high repetition rate metallic pattern transfer,�?? Microelectron. Eng. 50, 541-6 (2000). [CrossRef]
  14. J. Bohandy, B. F. Kim, F. J. Adrian, �??Metal deposition from a supported metal film using an excimer laser,�?? J. Appl. Phys. 60, 1538-9 (1986). [CrossRef]
  15. F. J. Adrian, J. Bohandy, B. F. Kim, A. N. Jette, �??A study of the mechanism of metal deposition by laser-induced forward transfer process,�?? J. Vac. Sci. Technol. B 5, 1490-4 (1987). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1. Fig. 2. Fig. 3.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited