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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 1 — Jan. 9, 2006
  • pp: 128–137

Broadband supercontinuum interferometer for high-resolution profilometry

D. Reolon, M. Jacquot, I. Verrier, G. Brun, and C. Veillas  »View Author Affiliations


Optics Express, Vol. 14, Issue 1, pp. 128-137 (2006)
http://dx.doi.org/10.1364/OPEX.14.000128


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Abstract

In this paper, it is shown that a white light supercontinuum source generated in an air-silica microstructured optical fiber pumped with picosecond pulses offers the possibility to improve fringes visibility in interferometric acquisitions. Consequently, this source combined with a spectral interferometer, reaches high-resolution profilometric measurements. Phase calculation based on seven point algorithm can perform theoretically a subnanometer resolution. This method provides a one line profile of large surfaces from the analysis of a single shot image, without any mechanical scanning.

© 2006 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.2880) Instrumentation, measurement, and metrology : Holographic interferometry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

Citation
D. Reolon, M. Jacquot, I. Verrier, G. Brun, and C. Veillas, "Broadband supercontinuum interferometer for high-resolution profilometry," Opt. Express 14, 128-137 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-1-128


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