OSA's Digital Library

Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 11 — May. 29, 2006
  • pp: 4662–4667

Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates

Sanjit K. Debnath, Mahendra P. Kothiyal, Joanna Schmit, and Parameswaran Hariharan  »View Author Affiliations


Optics Express, Vol. 14, Issue 11, pp. 4662-4667 (2006)
http://dx.doi.org/10.1364/OE.14.004662


View Full Text Article

Enhanced HTML    Acrobat PDF (101 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We describe how spectrally-resolved white-light phase-shifting interference microscopy with a windowed 8-step algorithm can be used for rapid and accurate measurements of the thickness profile of transparent thin film layers with a wide range of thicknesses deposited upon patterned structures exhibiting steps and discontinuities. An advantage of this technique is that it can be implemented with readily available hardware.

© 2006 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(240.0310) Optics at surfaces : Thin films

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: March 7, 2006
Revised Manuscript: May 13, 2006
Manuscript Accepted: May 17, 2006
Published: May 29, 2006

Citation
Sanjit K. Debnath, Mahendra P. Kothiyal, Joanna Schmit, and Parameswaran Hariharan, "Spectrally resolved white–light phase–shifting interference microscopy for thickness–profile measurements of transparent thin film layers on patterned substrates," Opt. Express 14, 4662-4667 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-11-4662


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. S. S. C. Chim and G. S. Kino, "Correlation microscope," Opt. Lett. 15, 579-581 (1990). [CrossRef] [PubMed]
  2. B. S. Lee and T. C. Strand, "Profilometry with a coherence scanning microscope," Appl. Opt. 29, 3784-3788 (1990). [CrossRef] [PubMed]
  3. P. Hariharan and M. Roy, "White-light phase-stepping interferometry for surface profiling," J. Mod. Opt. 41, 2197-2201 (1994). [CrossRef]
  4. P. Hariharan and M. Roy, "Interferometric surface profiling with white light: effect of surface films," J. Mod. Opt. 43, 1797-1800 (1996). [CrossRef]
  5. S. W. Kim and G. H. Kim, "Thickness profile measurement of transparent thin-film layers by white-light scanning interferometry," Appl. Opt. 38, 5968-5973 (1999). [CrossRef]
  6. D. Kim and S. Kim, "Direct spectral phase function calculation for dispersive interferometric thickness profilometry," Opt. Express,  12, 5117-5124 (2004). [CrossRef] [PubMed]
  7. D. Kim, S. Kim, H. Kong and Y. Lee, "Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter," Opt. Lett. 27, 1893-1895 (2002). [CrossRef]
  8. J. Calatroni, A. L. Guerrero, C. Sainz and R. Escalona, "Spectrally resolved white-light interferometry as a profilometry tool," Opt. Laser Technol. 28, 485-489 (1996). [CrossRef]
  9. P. Sandoz, G. Tribillon and H. Perrin, "High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms," J. Mod. Opt. 43, 701-708 (1996). [CrossRef]
  10. S. S. Helen, M. P. Kothiyal and R. S. Sirohi, "Analysis of spectrally resolved white light interferograms: use of a phase shifting technique," Opt. Eng. 40, 1329-1336 (2001). [CrossRef]
  11. S. K. Debnath and M. P. Kothiyal, "Optical profiler based on spectrally resolved white light interferometry," Opt. Eng. 44, 013606 (2005). [CrossRef]
  12. P. Hariharan, B. F. Oreb and T. Eiju, "Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm," Appl. Opt. 26, 2504-2506 (1987). [CrossRef] [PubMed]
  13. J. Schmit and K. Creath, "Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry," Appl. Opt. 34, 3610-3619 (1995). [CrossRef] [PubMed]
  14. J. Schmit and K. Creath, "Window function influence on phase error in phase-shifting algorithms," Appl. Opt. 35, 5642-5649 (1996). [CrossRef] [PubMed]
  15. M. Born and E. Wolf, Principles of Optics, 7th Ed. (Cambridge University Press, 1999), pp. 752-758.
  16. A. Harasaki and J. C. Wyant, "Fringe modulation skewing effect in white light vertical scanning interferometry," Appl. Opt. 39, 2101-2106 (2000). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited