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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 12 — Jun. 12, 2006
  • pp: 5558–5570

Demonstrating sub-nm closed loop MEMS flattening

Julia W. Evans, Bruce Macintosh, Lisa Poyneer, Katie Morzinski, Scott Severson, Daren Dillon, Donald Gavel, and Layra Reza  »View Author Affiliations

Optics Express, Vol. 14, Issue 12, pp. 5558-5570 (2006)

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Ground based high-contrast imaging (e.g. extrasolar giant planet detection) has demanding wavefront control requirements two orders of magnitude more precise than standard adaptive optics systems. We demonstrate that these requirements can be achieved with a 1024-Micro-Electrical-Mechanical-Systems (MEMS) deformable mirror having an actuator spacing of 340 µm and a stroke of approximately 1 µm, over an active aperture 27 actuators across. We have flattened the mirror to a residual wavefront error of 0.54 nm rms within the range of controllable spatial frequencies. Individual contributors to final wavefront quality, such as voltage response and uniformity, have been identified and characterized.

© 2006 Optical Society of America

OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(230.3990) Optical devices : Micro-optical devices
(350.1260) Other areas of optics : Astronomical optics

ToC Category:
Optical Devices

Original Manuscript: March 30, 2006
Revised Manuscript: May 26, 2006
Manuscript Accepted: May 29, 2006
Published: June 12, 2006

Julia W. Evans, Bruce Macintosh, Lisa Poyneer, Katie Morzinski, Scott Severson, Daren Dillon, Donald Gavel, and Layra Reza, "Demonstrating sub-nm closed loop MEMS flattening," Opt. Express 14, 5558-5570 (2006)

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