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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 13 — Jun. 26, 2006
  • pp: 5961–5967

Absolute distance measurement by lateral shearing interferometry of point-diffracted spherical waves

Jiyoung Chu and Seung-Woo Kim  »View Author Affiliations


Optics Express, Vol. 14, Issue 13, pp. 5961-5967 (2006)
http://dx.doi.org/10.1364/OE.14.005961


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Abstract

We describe a method of absolute distance measurement based on the lateral shearing interferometry of point-diffracted spherical waves. A unique feature is that the distance measurement is not confined only along a single line of the optical axis, but the target is allowed to take movement freely within a volumetric measurement space formed by the aperture angle of point-diffraction. Detailed measurement theory is explained along with experimental verification.

© 2006 Optical Society of America

OCIS Codes
(070.2590) Fourier optics and signal processing : ABCD transforms
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 12, 2006
Revised Manuscript: June 10, 2006
Manuscript Accepted: June 14, 2006
Published: June 26, 2006

Citation
Jiyoung Chu and Seung-Woo Kim, "Absolute distance measurement by lateral shearing interferometry of point-diffracted spherical waves," Opt. Express 14, 5961-5967 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-13-5961


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References

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