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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 13 — Jun. 26, 2006
  • pp: 6020–6028

Compact and low loss silicon-on-insulator rib waveguide 90° bend

Yusheng Qian, Seunghyun Kim, Jiguo Song, Gregory P. Nordin, and Jianhua Jiang  »View Author Affiliations

Optics Express, Vol. 14, Issue 13, pp. 6020-6028 (2006)

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A compact and low loss silicon-on-insulator rib waveguide 90° bend is designed and demonstrated. An interface realized by a trench filled with SU8 at the corner of a waveguide bend effectively reflects incoming light through total internal reflection (TIR). In order to accurately position the SU8-filled trench relative to the waveguide and reduce sidewall roughness of the interface, electron beam lithography (EBL) is employed while inductively coupled plasma reactive ion etching (ICP RIE) is used to achieve a vertical sidewall. The measured loss for TE polarization is 0.32 dB±0.02 dB/bend at a wavelength of 1.55 µm.

© 2006 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.2790) Integrated optics : Guided waves
(130.3120) Integrated optics : Integrated optics devices
(230.7390) Optical devices : Waveguides, planar
(250.5300) Optoelectronics : Photonic integrated circuits
(260.6970) Physical optics : Total internal reflection

ToC Category:
Integrated Optics

Original Manuscript: April 11, 2006
Revised Manuscript: June 5, 2006
Manuscript Accepted: June 7, 2006
Published: June 26, 2006

Yusheng Qian, Seunghyun Kim, Jiguo Song, Gregory P. Nordin, and Jianhua Jiang, "Compact and low loss silicon-on-insulator rib waveguide 90° bend," Opt. Express 14, 6020-6028 (2006)

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