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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 13 — Jun. 26, 2006
  • pp: 6297–6302

Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography

Jun Hyuk Moon, Shu Yang, Wenting Dong, Joseph W. Perry, Ali Adibi, and Seung-Man Yang  »View Author Affiliations

Optics Express, Vol. 14, Issue 13, pp. 6297-6302 (2006)

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We have fabricated diamond-like silicon photonic crystals through a sequential silica/silicon chemical vapor deposition (CVD) process from the corresponding polymer templates photopatterned by holographic lithography. Core-shell morphology is revealed due to the partial backfilling of the interstitial pores. To model the shell formation and investigate its effect to the bandgap properties, we developed a two-parameter level-set approach that closely approximated the core-shell morphology, and compare the bandgap simulation with the measured optical properties of the 3D crystals at each processing step. Both experimental and calculation results suggest that a complete filling is necessary to maximize the photonic bandgap in the diamond-like structures.

© 2006 Optical Society of America

OCIS Codes
(090.0090) Holography : Holography
(220.4000) Optical design and fabrication : Microstructure fabrication
(260.3160) Physical optics : Interference

ToC Category:
Photonic Crystals

Original Manuscript: May 18, 2006
Revised Manuscript: June 15, 2006
Manuscript Accepted: June 15, 2006
Published: June 26, 2006

Jun Hyuk Moon, Shu Yang, Wenting Dong, Joseph W. Perry, Ali Adibi, and Seung-Man Yang, "Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography," Opt. Express 14, 6297-6302 (2006)

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  27. The calculated bandgap width is smaller than literature value, which may be attributed to the discrepancy in refractive index of silicon used in calculation and calculation resolution.

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